Advanced PECVD LS Nitride2 Thickness uniformity 2016

	A	B	C	D	E	F	G	H
1	100.1740373
2			Thickness, A		Index @632.8nm		Thickness Uniformity, %	Comment
3			Min	Max	Min	Max
4		Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5		01-05-16	2320.12	2353.59	1.939	1.938		Thinner in the center
6		02-11-16	2614.81	2595.78	1.924	1.923	99.63	Thicker in the center
7		03-18-16	2532.13	2498.72	1.924	1.925	99.34	Thicker in the center
8		03-24-16	2500.85	2509.57	1.925	1.926		Thinner in the center
9		04-11-16	2518.23	2477.92	1.938	1.939	99.19	Thicker in the center
10		04-28-16	2521.48	2498.18	1.945	1.939	99.54	Thicker in the center
11		05-12-16	2369.30	2407.80	1.937	1.937		Thinner in the center
12		05-24-16	2330.19	2341.47	1.941	1.941		Thinner in the center
13		06-30-16	2222.26	2201.14	1.944	1.944	99.52	Thicker in the center
14		08-26-16	2231.00	2217.07	1.949	1.951	99.69	Thicker in the center
15		10-12-16	2321.84	2302.20	1.948	1.949	99.58	Thicker in the center
16		11-18-16	2213.90	2186.20	1.963	1.965	99.37	Thicker in the center
17		12-15-16	2351.38	2340.30	1.949	1.951	99.76	Thicker in the center
18		12-21-16	2321.17	2304.11	1.939	1.942	99.63	Thicker in the center
19		12-22-16	2321.59	2301.35	1.938	1.939	99.56	Thicker in the center
20		Average	2379.35	2369.03	1.940	1.941	99.53
21		Avg.+2%	2426.94	2416.41	1.979	1.979
22		Avg-2%	2331.76	2321.65	1.901	1.902
23		Max	2614.81	2595.78	1.963	1.965	99.76
24		Min	2213.90	2186.20	1.924	1.923	99.19
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54