8.33.1 - Nanospec 1054 Å SiO2 Thin Film Measurement Specification
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Measurement Specification: 8.33.1 - Nanospec 1054 Å SiO2 Thin Film on (nanospec)
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Description:This monitor tracks the average thickness, standard deviation, and range of a 5-point measurement on a standard film of SiO2 that is 1054 Å thick on top of a Si substrate. Process Staff should be notified if the 5-point measurement of the standard is more than +/- 5%Measurement Performance
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Tool:(nanospec)
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Standard:MNL Standard 1054 Å SiO2 jclark
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Location of Saved Data:N/A
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Tool Specifications
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StepToolSettings
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8.33.1 - Measure(nanospec)10x objective, no filter, program: 001 Oxide on Silicon (10x). This program assumes n = 1.459. Make a 5-point measurements at locations 5 cm from the center of wafer along X- and Y-axis.
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Output Response
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ResponseDescriptionTarget
(Å)
USL
(Å)
LSL
(Å)
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Average thickness5-point average of measurements taken at locations 5 cm from the center of wafer along X- and Y-axis.

USL and LSL are at +/- 5% of target.
105411071001
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For more information: tinyurl.com/nanospec-oxide
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