| A | B | C | D | E | F | G | H | I | J | K | ||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
1 | UNAXIS: LOW DEP. RATE SiO2 | Dep Recipe --> | COAT TIME: | 120 seconds | DEPOSTION TIME: | 780 seconds | WAFER: | 4in Si | Low Particle Count | SUBSTRATE THICKNESS: | 500μm - 550μm | |
2 | DATE | COMMENTS | FILM THICKNESS (nm) | DEPOSITION RATE (Å / sec) | DEPOSITION RATE (nm / min) | STRESS (MPa) | INDEX AT 632.8nm | INDEX AT 1550.0nm | GAIN 4 ADDED PARTICLES | GAIN 2 ADDED PARTICLES | BUFFER HF RATE (nm/min) | |
3 | AVERAGE: | 306.533 | 3.930 | 23.579 | -175.052 | 1.465 | 1.454 | 422.464 | 468.321 | 283.424 | ||
4 | 11/24/2025 | Good film | 307.430 | 3.9414 | 23.6485 | -169.6500 | 1.46664 | 1.45459 | 19 | 27 | ||
5 | 10/22/2025 | Good film | 313.860 | 4.0238 | 24.1431 | -187.6000 | 1.46602 | 1.45439 | 103 | 24 | ||
6 | 9/24/2025 | Good film | 312.060 | 4.0008 | 24.0046 | -170.0833 | 1.46540 | 1.45390 | 315 | 31 | ||
7 | 3/20/2025 | Circle of bubble near center of waffer, high bow | 307.590 | 3.9435 | 23.6608 | -167.7167 | 1.46489 | 1.45417 | 160 | 55 | 362.35 | |
8 | 3/11/2025 | high G4 count | 312.840 | 4.0108 | 24.0646 | -173.4333 | 1.46491 | 1.45405 | 2786 | 181 | 394.36 | |
9 | 3/4/2025 | looks good | 314.810 | 4.0360 | 24.2162 | -166.5167 | 1.46567 | 1.45470 | 240 | 339 | 373.42 | |
10 | 2/27/2025 | looks good | 313.730 | 4.0222 | 24.1331 | -163.2833 | 1.46500 | 1.45425 | 241 | 42 | 402.71 | |
11 | 2/7/2025 | no surfscan photos | 308.900 | 3.9603 | 23.7615 | -150.5167 | 1.46556 | 1.45463 | 8 | 30 | 364.36 | |
12 | 10/20/2024 | looks good. Uniformity ~3% | 315.940 | 4.0505 | 24.3031 | -169.2833 | 1.46515 | 1.45449 | 15 | 41 | 325.15 | |
13 | 9/19/2024 | Non-uniform film (~9%) | 313.900 | 4.0244 | 24.1462 | -163.6500 | 1.46510 | 1.45399 | 8 | 13 | ||
14 | 9/12/2024 | non uniform film (~8%) | 312.040 | 4.0005 | 24.0031 | -177.3667 | 1.46454 | 1.45355 | -24 | 7 | 292.69 | |
15 | 8/29/2024 | non uniform film (~8%) | 313.020 | 4.0131 | 24.0785 | -168.8000 | 1.46228 | 1.45244 | 72 | 8 | 340.20 | |
16 | 5/28/2024 | high particles | 293.930 | 3.7683 | 22.6100 | -161.9667 | 1.46438 | 1.45656 | 2173 | 116 | 327.55 | |
17 | 5/10/2024 | uneven | 321.100 | 4.1167 | 24.7000 | -240.6667 | 1.46767 | 1.45920 | 1133 | 31 | 507.87 | |
18 | 2/15/2024 | Particle count up ( hazy area in the middle), Wafer doesn't look uniform --> click link to right for layer thickness map | 308.440 | 3.9544 | 23.7262 | -172.3167 | 1.46622 | 1.45472 | 768 | 70 | 331.58 | |
19 | 10/27/2023 | high particle count on G4 | 306.200 | 3.9256 | 23.5538 | -171.4667 | 1.46265 | 1.45366 | 567 | 65 | 177.88 | |
20 | 8/31/2023 | particle counter machine was broken for pre-measurements | 312.930 | 4.0119 | 24.0715 | -169.5333 | 1.46222 | 1.45335 | 325 | 153 | 180.78 | |
21 | 8/24/2023 | looks good; missing file data, will be fixed | 313.220 | 4.0156 | 24.0938 | -174.5333 | 1.46223 | 1.45335 | 254 | 117 | 167.20 | |
22 | 6/8/2023 | Non-uniform film. Data entry error - possibly wrong Time entered, so Rate reported may be incorrect. | 245.970 | 3.1535 | 18.9208 | -192.2167 | 1.46009 | 1.44928 | 47 | 13 | 57.80 | |
23 | 5/19/2023 | G4 after failed, non-uniform film | 297.310 | 3.8117 | 22.8700 | -187.3333 | 1.46232 | 1.45151 | 1142 | 3104 | 157.76 | |
24 | 3/8/2023 | 305.880 | 3.9215 | 23.5292 | -188.4000 | 1.46451 | 1.45339 | 145 | 72 | |||
25 | 2/16/2023 | 308.700 | 3.9577 | 23.7462 | -186.6833 | 1.46587 | 1.45496 | 96 | 68 | 167.82 | ||
26 | 1/20/2023 | ~30 increase in G4 particles. Wafer doesn't look uniform --> click link to right for layer thickness map | 308.430 | 3.9542 | 23.7254 | -183.5500 | 1.46690 | 1.45341 | 29 | 41 | 170.16 | |
27 | 6/15/2022 | Wafer slid in the cassette during loading and collected a lot of particles. Particle data not valid | 304.140 | 3.8992 | 23.3954 | -176.9667 | 1.46462 | 1.45412 | ||||
28 | 5/12/2022 | No test wafer prior. Center of wafer had a circle of concentrated particles, see attached pictures | 303.131 | 3.8863 | 23.3178 | -168.2833 | 1.46340 | 1.45428 | 765 | 3931 | ||
29 | 4/7/2022 | 310.060 | 3.9751 | 23.8508 | -169.5667 | 1.46506 | 1.45422 | 133 | 251 | |||
30 | 11/8/2021 | 302.990 | 3.8845 | 23.3069 | -167.0500 | 1.46337 | 1.45464 | 0 | 0 | |||
31 | 8/17/2021 | 302.650 | 3.8801 | 23.2808 | -167.3333 | 1.46506 | 1.45444 | 48 | 13 | |||
32 | 7/30/2021 | 298.249 | 3.8237 | 22.9422 | -170.7500 | 1.46527 | 1.45457 | 261 | 4270 | |||
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