Furnace Log
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dateNameFurnace #Time StartTime FinishProjectRun Type (Growth/Clean)Temp (C)Measured Growth Height (microns)SubstrateIron Thickness (nm)Duration (hr:min:sec)H2 %H2 (sccm)H2 Tank Pressure (psi)C2H4%C2H4 (sccm)C2H4 Tank Pressure (psi)Ar %Ar (sccm)Ar Tank Pressure (psi)Air %Air (sccm)Notes
3
12/14/17``Kevin Laughlin217:0019:00BatteryAnneal750-Si/Fe10:00:0060.7307.030079.5335.040012.5300.01,00050.0Started new log sheet. For previous log sheet go to tab labeled Log 2013-2017
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12/14/17Derric Syme111:0019:00CNT FilmsBurnout850si/Fe4----------68.9300Just burning carbon out of SiO2 LPCVD structures
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12/14/17Kevin Laughlin220:0021:00BatteryGrowth750si/Fe10:01:00
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12/15/17David Kane110:0010:40CapacitorGrowth/Clean750Si/Al2O340:02:0065.6311.030047.0338.040070.0300Forgot to set C2H4 pressure so it stopped flowing, ruined samples, trying again.
7
12/15/17David Kane110:4011:40CapacitorGrowth/Clean750Si/Al2O340:10:0065.6311.030047.0338.040070.0300Samples look awful. Previously this was fixed by rinsing the wafers right before growth.
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12/15David Kane211:30CapacitorGrowth/clean750550Si/Al2O340:10:0060.7307.030079.5335.0400Rinsed samples before growth. They look better
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12/15/17Daniel Prawitt112:0014:30biofilm surfacesAnneal/Growth/infiltrate/clean800/800/900/900316L SSN/A2min/20min/7min60.7307.030047.0338.040014.4300.090070.0300
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12/15/17Derric Syme11517CNT FilmsBurnout850si/Fe4----------70.0300Just burning carbon out of SiO2 LPCVD structures
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12/15/17Derric Syme12224CNT FilmsBurnout850si/Fe4----------70.0300Just burning carbon out of SiO2 LPCVD structures
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12/20/17Daniel Prawitt111:002:00biofilm surfacesAnneal/Growth/infiltrate/clean800/800/900/900316L SS-2min/20min/7min---47.0338.037514.4300.090070.0300Ethylene valve was closed
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12/28/17Ben Brownlee19:0010:30GlucoseGrowth/Infiltration/Clean750/900/900380Si/Al2O3/Fe76:00/10:0065.6/44.0311/19030047.0338.037514.4311.085070.0300
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12/28/17Ben Brownlee111:0012:30GlucoseGrowth/Infiltration/Clean750/900/900360Si/Al2O3/Fe76:00/10:0065.6/44.0311/19030047.0338.037514.4311.085070.0300
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12/28/17Ben Brownlee113:0014:30GlucoseGrowth/Infiltration/Clean750/900/900340Si/Al2O3/Fe76:00/10:0065.6/44.0311/19030047.0338.037514.4311.085070.0300Slight decrease in growth height for first three growths.
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12/28/17Ben Brownlee114:3016:00GlucoseGrowth/Infiltration/Clean750/900/900340Si/Al2O3/Fe76:00/10:0065.6/44.0311/19030047.0338.037514.4311.085070.0300Growth height similar to 3rd run
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12/30/17Sterling Baird2~15:00BatteryMelt180NANANA5minNASeparate, sealed tube used
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12/30/17Sterling Baird218:08BatteryMelt~120/180NANANA10min/1minNA
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1/4/18Sterling Baird212:2413:24BatteryGr/Inf/Clean750/900/900 41 min/30 s60.730079.5300.0750
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1/4/18Sterling Baird215:506:10 PMBatteryInf/Clean900/900Si/Al2O3/Fe430min60.730079.5300.0700
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1/9/18Ben Brownlee112:3014:00IDEGrowth/Infiltration/Clean750/900/90070Si/Al2O3/Fe70:30/2:0065.6311.027547/30338/19337514.4311.072570.0300
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1/10/18Ben Brownlee17:309:00IDEGrowth/Infiltration/Clean750/900/900Si/Al2O3/Fe70:30/2:0065.6311.027547/30338/19337514.4311.070070.0300
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1/11/18Berg Dodson14;00ProbesGrowth/Clean750Si/Al2O3/Fe43 min65.6311.025047.0338.035014.4311.070070.0300
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1/12/18Ben Brownlee18:159:45IDEGrowth/Infiltration/Clean750/900/90050Si/Al2O3/Fe70:30/2:0065.6311.01,82547/30338/19335014.4311.065070.0300Little shorter than expected
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1/12/18Spencer Roberts113:3015:45ProbesGrowth/Clean750Si/Al2O3/Fe450 min65.6311.01,82547/30338/19335014.4311.065070.0300
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1/18/18Shane Sypherd113:0016:50THGrowth/Infiltration/Clean750/850/900Si/Al2O3/Fe45:45min/150min65.6311.01,82547.0338.030014.4311.065070.0300No growth. C2H4 valve was closed when I came in.
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1/18/18Spencer Roberts117:0019:00ProbesGrowth/Clean750Si/Al2O3/Fe450 min65.6311.01,82547.0338.030014.4311.050070.0300
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1/18/18Berg Dodson119:00ProbesGrowth/Clean750Si/Al2O3/W/Al2O3/Fe41200:00:0065.6311.01,80047.0338.030014.4311.050070.0300
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1/19/18Spencer Roberts113:0015:00ProbesGrowth/Clean750Si/Al2O3/Fe450 min65.6311.01,82547.0338.030014.4311.040070.0300
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1/19/18Berg Dodson219:0022:00ProbesGrowth/Clean750/900Si/Al2O3/Fe44 min311.01,800338.0200311.0300300
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1/22/18Kimberly Stevens110:0012:00SHSGrowth/Infiltration/Clean750/900/900Si/Al2O3/Fe70:00:15/0:01:0065.6/44.0311/1901,65047.0338.020014.4311.032570.0300
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1/22/18Shane Sypherd117:0019:00THGrowthx2/Clean750/900Si/Al2O3/Fe45:45min/150min65.6311.01,62547.0338.020014.4311.030070.0300Very short growths
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1/25/18Spencer Roberts116:0018:44ProbesGrowth/Clean750Si/Al2O3/Fe450 min65.6311.047.0338.020014.4311.025070.0300
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1/25/18Spencer Roberts216:0018:44ProbesGrowth/Clean750Si/Al2O3/Fe450 min65.6311.047.0338.020014.4311.025070.0300
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1/26/18Ben Brownlee18:4510:15IDEGrowth/Infiltration/Clean750/900/90065Si/Al2O3/Fe70:30/2:0065.6311.047/30338/19314.4311.070.0300C2H4 valve was closed initially. Spencer? Could you leave this open when you are done?
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1/26/18Ben Brownlee110:1511:30IDEGrowth/Infiltration/Clean750/900/90045Si/Al2O3/Fe70:30/2:0065.6311.047/30338/19314.4311.070.0300
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1/26/18Ben Brownlee111:3012:45IDEGrowth/Infiltration/Clean750/900/90035Si/Al2O3/Fe70:30/2:0065.6311.01,60047/30338/19327514.4311.022570.0300Not sure why height was so much lower than first run, generally poor quality run
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1/26/18Rebecca Prymak14:005:30IDEGrowth/Infiltration/Clean750/900/900Si/Al2O3/Fe70:30/2:0065.6311.01,60047/30338/19315014.4311.017070.0300
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1/29/18Sterling Baird22:002:30BatteryMelt150NA10minNA----------
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1/29/18David Kane214:3016:20CapacitorGrowth/clean750Si/Al2O340:50:0060.7307.01,60079.5335.015039.1Sulphur smell when opening tube to remove samples. Temperature was fluctuating 745-757 degrees - are the PID values wrong?
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1/30/18David Kane110:4012:25CapacitorGrowth/Clean750Si/Al2O340:50:0065.6311.01,60047.0338.010070.0300Very uneven growth height, unusable forests
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2/1/18Kimberly Stevens110:0012:00SHSGrowth/Infiltration/Clean750/900/900Si/Al20370:00:15/0:01:0065.6/44.0311/1901,57547.0338.010014.4311.015070.0300
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2/6/2018Stefan Lehnardt19:30:00 AM11:30:00 AMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,55035.0750.0120The tube was very dirty when I got here.
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2/7/2018Stefan Lehnardt12:00:00 PM4:00:00 PMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,52035.0750.0100
45
New cylinder
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2/8/18Sterling Baird213:0014:00BatteryInf/Clean900Si/Al2O3/CNTs420min60.7307.01,30079.5335.0700New ethylene cylinder
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2/9/18Ben Brownlee110:3012:00IDEGrowth/Infiltration/Clean750/900/9001Si/Al2O3/Fe70:30/2:0065.6311.01,50047/30338/19375014.4311.02,05070.0300Air was not left on when I arrived and the argon tank was previously left open. Both ethylene and argon tanks were replaced
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2/9/18David Kane29:3011:30CapacitorGrowth/clean750Si/Al2O340:50:0060.7307.01,50079.5335.070039.1Film on top of growth, unusually short in areas
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2/10/18Phillip Ng115:3018:00CNT FiltrationAnneal/growth/infil/clean800/800/900/900316 SS--2min/20min/10min65.6311.01,50047.0338.070014.4311.02,05070.0300Air was not left running when I got here, the fume hood was left up and the manual knob for the ethyene was closed.
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2/12/18Ben Brownlee19:0010:30IDEGrowth/Infiltration/Clean750/900/9001Si/Al2O3/Fe70:30/2:0065.6311.01,47547/30338/19372514.4311.02,00070.0300Essentially no growth, even after furnace was cleaned last week
51
2/12/18David Kane112:0014:00CapacitorGrowth/clean750/750Si/Al2O340:50:0065.6311.01,47547/30338.072514.470.0300Film on top of growth, unusually short in areas
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2/13/18Kimberly Stevens112:003:00SHSGrowth/Infiltration/Clean750/900/900Si/Al20370:00:15/0:01:0065.6/44.0311/1901,45047.0338.072514.4311.01,97570.0300
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2/14/18Sterling Baird210:3012:00 PMBatteryGrowth/Infiltration/Clean750/900/900Si/Al2O3445s/25s60.779.5Furnace 2 still fluctuating. Seems that PID was set to "off" (Under CTL control mode). Turned back on. Values are 16:26:5`
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2/14/18Phillip Ng117:307:00:00 PMCNT FiltrationAnneal/growth/infil/clean800/800/900/900316 SS--2min/20min/10min65.6311.01,45047.0338.070014.4311.01,97570.0300The back end cap was tightened way to much
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2/15/18Shane Sypherd112:0012:45THGrowth/Infiltration/Clean750/850/900>50Si/Al2O3/Fe45:45min65.6311.01,45047.0338.070014.4311.01,97570.0300Very short growth height
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2/16/18Kevin210:30BatteryGrowth/Infiltration/Clean750/900110Si/Al2O3/Fe41min/1min x460.7307.01,45079.5350.0700-----
57
2/16/18David Kane110:0012:00CapacitorGrowth/clean750/750500-1000Si/Al2O340:50:0065.6311.01,45047/30338.067514.470.0300Film on top of growth, short streak
58
2/20/18Kevin21013BatteryInfiltration/Clean900/900CNT/Si0:20:0060.7307.01,40079.5350.0675
59
2/20/18Kevin213:30BatteryGrowth/Infiltration/Clean750/900/900Si/Al2O3/Fe40:0:1/0:0:160.7307.01,40079.5350.0675
60
2/21/18David Kane117:00CapacitorGrowth/clean750/7501300Si/Al2O340:50:0065.6311.01,40047.0338.067514.470.0300
61
2/21/18David Kane19:3011:30CapacitorGrowth/clean750/750Si/Al2O340:50:0065.6311.01,40047.0338.062514.470.0300Accidentally flowed C2H4 while ramping up, turned it off at 495 C. Doesn't look like any extra growth happened as a result
62
2/23/18Shane Sypherd113:4515:00THGrowth/Clean750/750>50Si/Al2O3/Fe45:45min65.6311.01,40047.0338.062514.4311.01,95070.0300
63
2/23/18Shane Sypherd117:0021:15THGrowth/Clean750/850/900172Si/Al2O3/Fe49min/150min65.6311.01,40047.0338.062514.4311.01,95070.0300
64
2/27/2018Stefan Lehnardt19:30:00 AM11:30 AMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,30035.0750.01,550
65
2/28/2018Sterling Baird21:00 PM2:00 PMBatteryInf/Clean900/900CNTs on Si420min60.7307.01,30079.5335.0700
66
3/1/18Rebecca Prymak12:3016:45IDEGrowth/Infiltration/Clean750/900/9001Si/Al2O3/Fe70:30/2:0065.6311.01,30047/30338/19370014.4311.01,50070.0300Boat was broken before I got here. Poor growth.
67
3/2/2018Kevin214:0016:00BatteryInfiltration/Clean900/900-siCnt-
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3/5/18Kevin211:3013:00BatteryInfiltration/Clean900/900-CNT/Si0:30:0060.7307.01,25079.5335.0650---40.0
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3/5/18Shane Sypherd113:0014:00THGrowth/Clean750/850> 50Si/Al2O3/Fe46:30 min65.6311.01,25047.0338.070014.4311.01,50070.0300Boat broken and hood and floor were a mess when I got here. Short growth.
70
3/6/18Danni Porter114:0016:40SS patternAneal/Growth/Infiltration/Clean800/800/900/900316lss-2:40min---47.0338.060014.4311.01,45070.0300Boat still broken
71
3/6/18Kevin29:3011BatteryInfiltration/Clean900/900-CNT/Si0:30:0060.7307.01,25079.5335.0650---40.0
72
3/7/18David Kane17:309:00CapacitorGrowth/clean750/750200-400Si/Al2O340:50:0065.6311.01,22547.0338.070014.41,42570.0300
73
3/7/2018David Kane27:309:00CapacitorGrowth/clean750/750100-500Si/Al2O340:50:0060.7307.01,22579.5335.07001,42539.1Thank you Kevin? for fixing the PID parameters.
74
3/7/18Kimberly Stevens19:00SHSGrowth/Infiltration/Clean750/900/900Si/Al20370:00:15/0:01:0065.6/44.0311/1901,20047.0338.070014.4311.01,42570.0300
75
3/7/2018David Kane29:15CapacitorGrowth/clean750/750Si/Al2O340:50:0060.7307.01,22579.5335.07001,42539.1
76
3/7/2018Danni Porter115:0017:45SS patternAneal/Growth/Infiltration/Clean800/800/900/900316lss-2:45min---47.0338.070014.4311.01,40070.0300Boat still broken
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3/8/2018Stefan Lehnardt18:30:00 AM10:30 AMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,20035.0750.01,200
78
3/8/2018Danni Porter115:00SS patternAneal/Growth/Infiltration/Clean800/800/900/900316lss----47.0338.070014.4311.01,15070.0300Boat still broken
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3/9/18Berg Dodson19:0012:00--Deep Clean900--------0.00.01,2000.00.07000.00.01,15070.0300Fan broken before arrival. Funace was deep cleaned normally.
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3/9/18Shane Sypherd112:2513:30THGrowth/Clean750/750>50Si/Al2O3/Fe410 min65.6311.01,15047.0338.070014.4311.01,15070.0300Fan was broken before I got here. Growth was shot (less than 50 microns after 10 min growth)
81
3/9/18Kevin Laughlin214:3016:00BatteryGrowth/Infiltration/Clean750/900/900si/Fe401:00/00:3060.7307.01,11079.5335.07001,15039.1
82
3/10/2018Stefan Lehnardt19:00:00 AM11:00 AMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,10035.0750.01,100
83
3/10/2018Stefan Lehnardt112:30:00 PM1:30 PMMoxtekAnneal350Si/SiO2/graphene1:00:0099.0500.71,10035.0750.01,050
84
3/14/2018David Kane110:3012:30CapacitorGrowth/clean750/750Si/Al2O340:50:0065.6311.01,07547.0338.070014.470.0300Terrible growth. Boat was slightly red after clean
85
3/14/2018Chris Groberg114001600Cell GrowthGrowth/Infiltration/Clean150/900/900Stainless25min/11min65.61,00047.060014.41,00070.1300
86
3/15/2018Rebecca Prymak13:30 PM5:30 PMIDEGrowth/Infiltration/Clean750/900/9001Si/Al2O3/Fe710:00/2:0065.6311.01,00047/30338/19360014.4311.01,00070.0300 Air was not flowing when I came in. Fan was cosmetically damaged when I came in. Still works if you just plug it in. Boat has a yellowish build up after clean.
87
2/7/2018Stefan Lehnardt18:30:00 AM10:30:00 AMMoxtekAnneal350Si/SiO2/graphene2:00:0099.0500.71,00035.0750.0920Boat has a crusty, yellowish buildup.
88
3/20/2018Spencer Roberts212:0013:35ProbeInfiltration/Clean900-Si/Al2O3/Fe42 min60.7307.01,00079.5335.012.2300.041.5300
89
3/20/2018Danni Porter113:30SS patternAneal/Growth/Infiltration/Clean800/800/900/900316lss-----47.0338.060014.4311.092070.0300
90
3/26/2018Kevin211:0012:30CNTGrowth75025Si/Al2O3/Fe40:00:1560.7307.01,00079.5335.0700-----Heigths were very uniform over all 3 samples.
91
3/26/2018Kevin211:0012:30CNTGrowth75020Si/Al2O3/Fe40:00:1060.7307.01,00079.5335.0700-----The CNTs looked non uniform, but the height was uniform.
92
3/26/2018Kevin211:0012:30CNTInfiltration/Clean900Si/Al2O3/Fe40:01:0060.7307.01,00079.5335.0700-----
93
3/27/18Bryce19:0010:00TrainingGrowth750noneN/A65.6311.01,00047.0338.070014.4311.085070.0300
94
3/27/18Shane Sypherd113:0014:30THGrowth/Clean750/750~100Si/Al2O3/Fe410 min65.6311.01,00047.0338.070014.4311.085070.0300Tube had/has buildup in front end like someone turned off all gasses while hot, causing back gas to make tube dirty. Shorter growth than expected.
95
3/28/18Shane Sypherd110:3011:50THGrowth/Clean750/750Si/Al2O3/Fe420 min65.6311.01,00047.0338.070014.4311.080070.0300
96
3/29/2018Kevin29:3010:30CNTGrow/Infil/Grow/Clean750/900/75060Si/Al2O3/Fe430s:120s:30s60.7307.01,00079.5335.0700-----
97
3/29/2018Kevin19:3010:30CNTGrow/Infil/Grow/Clean750/900/750Si/Al2O3/Fe430s:120s:30s65.7311.01,00047.0338.0700-----
98
3/29/2018Kevin29:3010:30CNTGrowth750?Si/Al2O3/Fe430s60.7307.095079.5335.0700-----
99
3/29/2018Kevin29:3010:30CNTGrow/Infil/Grow/Clean750/900/75060Si/Al2O3/Fe430s:120s:30s60.7307.095079.5335.0700-----
100
3/29/2018Spencer Roberts117:0019:00ProbeGrowth/Clean750~300Si/Al2O3/Fe450min65.7311.090047.0338.070014.4311.0200--Furnace wouldn't heat up for cleaning for about 5 min, then it started
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