NNCI siteTitle of the documentShort description of contentLinkMain PurposeSecond Purpose
Type of document:
Intro/Background, Training, Misc
Playlist / series?Make / Manufacturer, ModelMedia typeHow long is the video? (Approximate to total number of minutes)Licensing/Copyright
Kentucky Multi-Scale Manufacturing and Nano Integration Node (KY MMNIN)MET Service Center: User TrainingTraining Videos, X-Ray Diffractometer (XRD); X-Ray Photoelectron Spectroscopy (XPS); Scanning Electron Microscope (SEM); Raman & Photoluminescence Spectroscopy; Chemisorption: Temperature-Programmed Reduction (TPR)https://www.conncenter.org/user-trainingX-Ray (XRD, XPS, XCT)TrainingyesvariousVideo (YouTube, etc)30
Mid-Atlantic Nanotechnology Hub (MANTH)Oxford 80+ RIE Tool TrainingOxford 80+ RIE tool traininghttps://www.youtube.com/watch?v=aXAcgAkQpLc&feature=youtu.beEtching (Wet & Dry)TrainingnoOxford Instruments Plasma Lab 80+ RIEVideo (YouTube, etc)8Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)SPTS DRIE Tool Training Part 1, Introduction & Wafer CleaningSPTS DRIE tool training, part 1https://www.youtube.com/watch?v=UmRFj_2kdJ8&feature=youtu.beEtching (Wet & Dry)TrainingnoSPTS Rapier Si DRIEVideo (YouTube, etc)4Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)SPTS DRIE Tool Training Part 2, Operating The ToolSPTS DRIE tool training, part 2https://www.youtube.com/watch?v=8zW80SfvrTM&feature=youtu.beEtching (Wet & Dry)TrainingnoSPTS Rapier Si DRIEVideo (YouTube, etc)7.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)QNF - Introduction and GowningGowning and Cleanroom Orientationhttps://www.youtube.com/watch?v=W0iSpY5VmLo&feature=youtu.beGeneral (Safety & Orientation)TrainingpartN/AVideo (YouTube, etc)4.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Training Videos for the Resumption of Research Training-QNFAddendum to QNF orientation for protocols that enhance social distancing and reduce COVID spread.https://www.youtube.com/watch?v=3C2V7GHi78o&feature=youtu.beGeneral (Safety & Orientation)TrainingnoN/AVideo (YouTube, etc)5.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Bay3Rev0QNF Bay 3 Orientation Covering Personal Protective Equipment and the Buddy Systemhttps://www.youtube.com/watch?v=psvghA9yWOQ&feature=youtu.beGeneral (Safety & Orientation)TrainingpartN/AVideo (YouTube, etc)1.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)EmergenciesRev0QNF Cleanroom Orientation covering: small spills, large spills, chemical exposure, evacuationhttps://www.youtube.com/watch?v=ybqQmVumWsU&feature=youtu.beGeneral (Safety & Orientation)TrainingpartN/AVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Filmetrics F40 TutorialThis is a self-training video for the Filmetrics F40 reflectometry tool located in the QNF cleanroom.https://www.youtube.com/watch?v=RRgatNP7JUI&feature=youtu.beMetrology (Ellipsometry, Profilometry, film characterization)TrainingnoFilmetrics F40Video (YouTube, etc)5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Vacuum Degassing of PDMSTutorial on mixing and degassing PDMShttps://www.youtube.com/watch?v=powcV3r4IhMSoft & Hybrid Materials (DSC, DLS, GPC, BET, TGA)TrainingnoVacuum ChamberVideo (YouTube, etc)2.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)01 - Introduction | BEAMER, Heidelberg DWL66+ TrainingIntroduction to BEAMER training, quick-start version.https://www.youtube.com/watch?v=P-JLRXR2Y4w&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=2&t=0sLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER SoftwareVideo (YouTube, etc)9.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)02 - Import & VIEWER | BEAMER, Heidelberg DWL66+ TrainingImporting designs & using VIEWER to naviate in BEAMERhttps://www.youtube.com/watch?v=QL-DcDY_jAg&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=2Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER GenISys GmbHVideo (YouTube, etc)3.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)03 - Exporting Data | BEAMER, Heidelberg DWL66+ TrainingExporting write job data from BEAMER in the Heidelberg DWL66+ format.https://www.youtube.com/watch?v=VjKSP_SQa1s&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=3Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER - GenISys GmbHVideo (YouTube, etc)10Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)03 - Setting Grid & Zoom | LayoutEditor TrainingSetting Grid & Zoom for BEAMERhttps://www.youtube.com/watch?v=OuD56VaWQTM&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=3Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)04 - Extract | BEAMER, Heidelberg DWL66+ TrainingExtract node in BEAMER.https://www.youtube.com/watch?v=_gtqSERgm-Q&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=4Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER - GenISys GmbHVideo (YouTube, etc)6.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)05 - Heal & Transform | BEAMER, Heidelberg DWL66+ TrainingHeal & transform nodes in BEAMER.https://www.youtube.com/watch?v=pjZE8a88bfs&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=5Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER - GenISys GmbHVideo (YouTube, etc)4Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)06 - Mechanics of BEAMER | BEAMER, Heidelberg DWL66+ TrainingMechanics of using BEAMER.https://www.youtube.com/watch?v=ynwo8rlY_Gc&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=6Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER - GenISys GmbHVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)ABM Tutorial 2019Training ABM Mask Alignerhttps://www.youtube.com/watch?v=cRzLljt0VLsLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingnoABM 3000HR Mask AlignerVideo (YouTube, etc)6Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Developing of SU8 or KMPRProcedure for developing negative resist such as SU8 or KMPR.https://www.youtube.com/watch?v=Wzrsv_01ZNELithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Processing (Wet Bench)TrainingnoN/AVideo (YouTube, etc)1Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Training Video for Using Long-Pass Filter on MA6Installing a Long Pass Filter on the MA6https://www.youtube.com/watch?v=ARgXeySaeUI&feature=youtu.beLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingnoSUSS MicroTec MA-6Video (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)MA6 Mask Aligner Training - First MaskMA6 Mask Aligner Tutorialhttps://www.youtube.com/watch?v=SCs87pYIn5wLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingnoSUSS MicroTec MA-6Video (YouTube, etc)5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Mask Post-processing Training VideoMask Post-processing Training Video including mask development, Chromium Etching, and Resist Striphttps://www.youtube.com/watch?v=rUZZQE-gFbs&feature=youtu.beLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Processing (Wet Bench)TrainingnoSolvent Process Bench, Reynolds Tech Positive Photoresist Develop Bench, Video (YouTube, etc)10Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)SU8 Spin Coating (CEE spinner)SU8 Spin Coating Traininghttps://www.youtube.com/watch?v=RrLYqWxgjK4Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingnoVideo (YouTube, etc)1.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)07 - Quick-Start Summary | BEAMER, Heidelberg DWL66+ TrainingSummary of material covered in this short BEAMER training.https://www.youtube.com/watch?v=OPMICzchqNM&list=PLiihbHV9HgpWZikttBFUh2O8EGUsRu348&index=7Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartBEAMER, GenISys GmbHVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Anatech Barrel Asher TutorialTutorial on how to use the Anatech SCE-108 Barrel Asherhttps://www.youtube.com/watch?v=R3G-jiCzwDg&feature=youtu.beEtching (Wet & Dry)TrainingnoAnatech SCE-108 Barrel AsherVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Working at Benches in QNFWet Bench Orientationhttps://www.youtube.com/watch?v=yLcHWaEEeAg&feature=youtu.beGeneral (Safety & Orientation)Processing (Wet Bench)TrainingpartReynolds Tech Positive Photoresist Spinner Bench, Develop Bench, Negative Photoresist Spinner Bench, Negative Photoresist Develop Bench, Reynolds Tech E-Beam Resist Spin & Develop Bench, Solvent Process Bench, Acid Process BenchVideo (YouTube, etc)5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)SpinCoating QNFCleanroomTutorial for properly using the spin coaters in the QNF Cleanroom at Penn.https://www.youtube.com/watch?v=ibWIng2RUm8&feature=youtu.bePhotolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingnoReynolds Tech Positive Photoresist Spinner BenchVideo (YouTube, etc)5.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)Iris Phone TrainingNavigating the phone version of IRIShttps://www.youtube.com/watch?v=JNaJ7bOKijk&feature=youtu.beGeneral (Safety & Orientation)SoftwareTrainingnoN/AVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)02 - Upload License & Set Display | LayoutEditor TrainingUploading license file & setting display in LayoutEditor.https://www.youtube.com/watch?v=iEUmbFEOKFY&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=2Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)2.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)04 - Drawing Boxes & Active Mode | LayoutEditor TrainingDrawing Boxes and working with the active mode for BEAMERhttps://www.youtube.com/watch?v=KjeyF2mo5Co&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=4Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH) 0:30 / 3:09 LayoutEditor Training Quattrone Nanofabrication Facility 5 / 17 05 - Selecting & Deleting Objects | LayoutEditor TrainingSelecting & deleting objects in LayoutEditorhttps://www.youtube.com/watch?v=mVedmiad5Yc&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=5Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)06 - Properties | LayoutEditor TrainingSetting properties of objects in LayoutEditorhttps://www.youtube.com/watch?v=WAaZjPs2xNE&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=6Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)4Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)07 - Cells & Circles | LayoutEditor TrainingDrawing references to cells and drawing circles in LayoutEditorhttps://www.youtube.com/watch?v=AJ4aGsest04&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=7Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)4Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)IRIS - Using on desktopTips for using IRIS to operate tools in QNF cleanroomhttps://www.youtube.com/watch?v=c3AdaHMCUw8&feature=youtu.beLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingnoN/AVideo (YouTube, etc)4.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)01 - Introduction | LayoutEditor TrainingIntroduction to LayoutEditor training course.https://www.youtube.com/watch?v=pPqP96IDFQo&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=1Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, Jürgen ThiesVideo (YouTube, etc)8Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)08 - Cell Array | LayoutEditor TrainingDrawing cell arrays in LayoutEditorhttps://www.youtube.com/watch?v=CML2npRn7Pw&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=8Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)09 - Paths & Polygons | LayoutEditor TrainingDrawing paths & polygons in LayoutEditor. Paths are often useful for drawing things like channels and/or electrical wires.https://www.youtube.com/watch?v=dABerE8vSw8&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=9Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)7Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)10 - Text | LayoutEditor TrainingDrawing text in LayoutEditorhttps://www.youtube.com/watch?v=SKwoanH63CA&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=10Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)11 - Move/Scale & Copy/Move | LayoutEditor TrainingMove/Scale & Copy/Move commands in LayoutEditorhttps://www.youtube.com/watch?v=eprM4nHWQac&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=11Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)12 - Layers, part 1 | LayoutEditor TrainingWorking with layers in LayoutEditor, part 1.https://www.youtube.com/watch?v=plT-13ZuIis&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=12Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)13 - Layers, part 2 | LayoutEditor TrainingWorking with layers in LayoutEditor, part 2.https://www.youtube.com/watch?v=RPhiYEfEseY&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=13Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)3Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)14 - Integrated Practice | LayoutEditor TrainingIntegrated practice of LayoutEditorhttps://www.youtube.com/watch?v=Rr15jtOyz7I&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=14Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)14 - Integrated Practice | LayoutEditor TrainingIntegrated practice in LayoutEditorhttps://www.youtube.com/watch?v=Rr15jtOyz7I&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=14Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)2Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)15 - Bonus #1 - MA6 Alignment Marks | LayoutEditor TrainingLayoutEditor Bonus lesson #1 - alignment marks for the SUSS MA6 mask aligner.https://www.youtube.com/watch?v=EPuyU1H3IDg&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=15Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)10Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)16 - Bonus #2 - ABM Alignment Marks | LayoutEditor TrainingLayoutEditor Bonus lesson #2 - alignment marks for the ABM mask aligner.https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)1.5Unlicensed
Mid-Atlantic Nanotechnology Hub (MANTH)17 - Bonus #3 - Boolean Ops | LayoutEditor TrainingLayoutEditor Bonus lesson #3 - boolean operations.https://www.youtube.com/watch?v=UF6JSozA2WA&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=17Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)SoftwareTrainingpartLayoutEditor, juspertor GmbHVideo (YouTube, etc)7.5Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)ALD TrainingTraining video to learn the basics of operation.https://www.mnc.umn.edu/current-users/equipment-trainingDeposition (Metallization)TrainingCambridge Nanotech ALDVideo (YouTube, etc)454Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)Training Video--Sputter DepositionTraining Video--Sputter Depositionhttps://www.mnc.umn.edu/current-users/equipment-training#ajaDeposition (Metallization)TrainingAJAVideo (YouTube, etc)Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)CHA EvaporatorTrainingTraining for the CHA Evaporatorhttps://www.mnc.umn.edu/current-users/equipment-training#chaDeposition (Metallization)TrainingCHA EvaporatorVideo (YouTube, etc)28Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)STS Etcher Training VideoTraining for STS Etcher https://www.mnc.umn.edu/current-users/equipment-training#stsEtching (Wet & Dry)TrainingSTSVideo (YouTube, etc)8Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)Filmetrics Training Video Training for Filmetrics thin film measurement systemhttps://www.mnc.umn.edu/current-users/equipment-training#filmetricsMetrology (Ellipsometry, Profilometry, film characterization)TrainingFilmetricsVideo (YouTube, etc)4Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)Nanospec Training Video Training for thin film analyzer https://www.mnc.umn.edu/current-users/equipment-training#nanospecMetrology (Ellipsometry, Profilometry, film characterization)TrainingNanospecVideo (YouTube, etc)4Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)P-16 and P-7 TrainingTraining video for KLA Tenncor profilometershttps://www.mnc.umn.edu/current-users/equipment-training#p-16Metrology (Ellipsometry, Profilometry, film characterization)TrainingKLA-Tenncor P-7, P-16Video (YouTube, etc)15Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)Lab TrainingLab Traininghttps://training.umn.edu/courses/19326Soft & Hybrid Materials (DSC, DLS, GPC, BET, TGA)Trainingn/aOnline course (edX, Coursera, Canvas)Unlicensed
Midwest Nanotechnology Infrastructure Corridor (MINIC)Critical Point Dryer TrainingTraining video for Critical Point Dryerhttps://www.mnc.umn.edu/current-users/equipment-training#cpdSample PrepTrainingVideo (YouTube, etc)11Unlicensed
Montana Nanotechnology Facility (MONT)Material Characterization using electron microscopy and spectroscopy: Examples using SEM, XPS and Auger Introduction of methods used to characterize materials (engineered and natural) using combined electron beam imaging and spectral analysis. https://www.youtube.com/watch?v=yeOxrGKCka0&index=1&list=PLGfr4aGVCmFbEa7XU9i4UU2ZdlhBbvrKnChemical / Composition Analysis (Raman, FTIR, UV/Vis, EDS, EBSD)Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundyesn/aPresentation / Powerpoint60Unlicensed
Montana Nanotechnology Facility (MONT)From Microfluidics to Nano-optics: Building Devices in the Montana Microfabrication Facility Overview of tools and processes available in the Montana Microfabrication Facility (MMF) which includes an explanation of deposition, patterning, etching, metrology and packaging steps used in fabrication.https://www.youtube.com/watch?v=1JL2jvcI74U&index=3&list=PLGfr4aGVCmFbEa7XU9i4UU2ZdlhBbvrKnGeneral (Safety & Orientation)Intro/BackgroundMultiple toolsPresentation / Powerpoint57Unlicensed
Montana Nanotechnology Facility (MONT)Applications of Raman Confocal Spectromicroscopy in Biogeochemistry, Geology, Materials Science and Engineering Webinar on fundamentals of Raman spectroscopy https://www.youtube.com/watch?v=KoYGng59rUQ&feature=youtu.beMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/BackgroundHoriba LabRAM Evolution Confocal Raman MicroscopePresentation / Powerpoint45Unlicensed
Montana Nanotechnology Facility (MONT)Imaging Microoganisms on SurfacesApplication of confocal scanning laser microscopy to image microorganisms on natural and engineered surfaces.https://www.youtube.com/watch?v=ip2x4CM-_CI&index=2&list=PLGfr4aGVCmFbEa7XU9i4UU2ZdlhBbvrKnMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/BackgroundLeica TCS-SP5 upright or inverted microscopesPresentation / Powerpoint55Unlicensed
Montana Nanotechnology Facility (MONT)Applications of Integrated NanoAuger Probe in Materials ScienceWebinar on similarities and differences between an integrated Auger nanoprobe and a high-resolution field emission electron microscope equipped with X-ray microanalysis. https://www.youtube.com/watch?v=sOCuQjVQpX8Chemical / Composition Analysis (Raman, FTIR, UV/Vis, EDS, EBSD)Intro/BackgroundPHI 710Presentation / Powerpoint58Unlicensed
nano@stanfordedX: Physical Vapor DepositionPhysical vapor deposition (PVD) represents a variety of vacuum deposition techniques that can deposit thin films onto substrates. The material used to form the thin film is often called source material in evaporation, or target in sputtering. The name, physical vapor deposition, indicates that no new chemical bonds are formed at the interface, and the film growth is driven by physisorption. The thickness of PVD films usually range from angstroms to microns. During the PVD process, the use of a high vacuum chamber is essential to achieve high film purity. PVD coatings are widely used in semiconductor devices, solar energy, optics and many other industries. Two main types of PVD, evaporation and sputtering, are introduced here.https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/jump_to/block-v1:StanfordOnline+ENGRX0001+1T2020+type@sequential+block@e9ca7776032d4441815fb5f6f3b0e1f3Deposition (Metallization)Intro/Backgroundyesn/aOnline course (edX, Coursera, Canvas)
nano@stanfordedX: Chemical Vapor Deposition OverviewChemical vapor deposition is another important thin film deposition technique and it is prevalent throughout industries. CVD can be defined as a process in which the vapor phase gases chemically react on the substrate surface to form thin films. Reactant gases are also known as “precursors”. During a CVD process, precursors are pumped into a reaction chamber, and the chamber is heated to a desired temperature to allow precursor gases to bond with the substrate surfaces. The occurrence of the chemical reaction is essential during the CVD film growth. One of the products of the reaction will deposit onto the substrate as a thin film and the by-products are pumped out. Due to the chemical bonding, the adhesion between the film and the substrate is much stronger compared to typical PVD films.https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/d3fccb4138f64d03a45ef4a77c97c3d1/3173e47dc49747d481f1e6f371f50753/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%403173e47dc49747d481f1e6f371f50753Deposition (Metallization)Intro/Backgroundyesn/aOnline course (edX, Coursera, Canvas)
nano@stanfordedX: Atomic Layer DepositionAtomic Layer Deposition (ALD) is a thin-film deposition technique based on self-limiting surface reactions. Most ALD reactions involve two gas phase chemicals, also known as “precursors”. The precursors react with the substrate surface in a sequential order in the form of non-overlapping pulses. Each cycle should last long enough until all the reactive sites on the surface are consumed. Due to the self-limiting nature of the reactions, ALD is able to grow pinhole-free and conformal thin films. The thickness of the thin films can be controlled by the number of processing cycles, and films at atomic level precision can be achieved. One of the main motivations for ALD is semiconductor devices fabrication. ALD has been used for applications such as high dielectric constant gate oxides in MOSFET, copper diffusion barriers in interconnects, and solid oxide fuel cells.https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/bab7a355c5fd4988a072fedca82512ee/8c848ef943d04e0d84421f2f4bb16fe6/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%408c848ef943d04e0d84421f2f4bb16fe6Deposition (Metallization)Intro/Backgroundyesn/aOnline course (edX, Coursera, Canvas)
nano@stanfordPlasmaQuest EtcherPlasma Quest (pquest) is an ECR plasma etcher primarily used for etching GaAs. It only accepts 4-inch wafers.https://www.youtube.com/watch?v=54rGq2IEGGYEtching (Wet & Dry)TrainingPlasma Quest EtcherVideo (YouTube, etc)
nano@stanfordDry EtchingIntroduction to dry etching, choosing a dry etching process & tool, dry etching mechanisms, basics of plasmas & types of toolshttps://www.youtube.com/playlist?list=PLaWbUJn2CJH_y98IBDKwIemykbEaeQkRGEtching (Wet & Dry)Intro/Backgroundyesn/aVideo (YouTube, etc)
nano@stanfordMarch Instruments Plasma Asher PX-250The basics of using the March Instruments PX-250 Plasma Asher. This is a parallel plate oxygen plasma machine used for etching away organic films, and cleaning. It is also used for chemically modifying the surface of materials such as PDMS and glass to allow for better adhesion. This machine is located in the Flexible Cleanroom, which is part of SNSF (Stanford Nano Shared Facilities) at Stanford University.https://www.youtube.com/watch?v=2DX5MsDqnvoEtching (Wet & Dry)TrainingMarch Instruments PX-250 Plasma AsherVideo (YouTube, etc)
nano@stanfordWet bench: silicon oxide etch with hydrofluoric acidExample of etching silicon oxide (SiO2) with hydrofluoric acid. Note the hydrophilic and hydrophobic change as the silicon oxide layer is removed.https://www.youtube.com/watch?v=1gyTZwwCZM8Etching (Wet & Dry)Processing (Wet Bench)Trainingn/aVideo (YouTube, etc)
nano@stanfordWet bench: Clean - Piranha solution, resist removalClean - Piranha solution, resist removalhttps://www.youtube.com/watch?v=HiJNI8k1docEtching (Wet & Dry)Processing (Wet Bench)Trainingn/aVideo (YouTube, etc)
nano@stanfordWafer Handling videos Wafer handling, working with non-standard substrate, cleaving wafers & substrateshttps://www.youtube.com/playlist?list=PLaWbUJn2CJH_WSVecQJiEUlFopibnxleMGeneral (Safety & Orientation)Processing (Wet Bench)Trainingyesn/aVideo (YouTube, etc)
nano@stanfordSolvent bench fire suppressionThis bench is equipped with a carbon dioxide fire suppression system at Stanford Nanofabrication Facility, known as wbflexsolv.https://youtu.be/_UV3J0ILBGAGeneral (Safety & Orientation)Trainingn/aVideo (YouTube, etc)
nano@stanfordPlastic (Delrin) Tweezers Cleaninghttps://www.youtube.com/watch?v=EUpdZMtI1OgGeneral (Safety & Orientation)Trainingn/aVideo (YouTube, etc)
nano@stanfordedX: Introduction of Transmission Electron Microscopy (TEM)Introduction of Transmission Electron Microscopy (TEM)https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/060b0c34ca4e407eb7fb4d143ba2b90b/0ded6fa72d5146af8361f696f52908e5/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%400ded6fa72d5146af8361f696f52908e5Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/BackgroundyesTitan TEMOnline course (edX, Coursera, Canvas)
nano@stanfordOptical MicroscopeGeneral guide on how to operate an optical microscope with staff from the Stanford Nanofabrication Facility (SNF).https://www.youtube.com/watch?v=ZO-qkAZ0Ew8Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordIn Situ TEMIn Situ TEM, hosted by Roy Kim, TEM staff at Stanford Universityhttps://youtu.be/ZDdOxJIYMFMMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordDiffraction Techniques in TEM and STEMDiffraction Techniques in TEM and STEM, hosted by Ann Marshall, TEM staff at Stanford Universityhttps://youtu.be/Vc3ElOcbJzMMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordAdvanced TEM techniquesTEM Sample Preparation, hosted by Roy Kim, TEM staff at Stanford Universityhttps://youtu.be/oF959uOWRYIMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Trainingn/aVideo (YouTube, etc)
nano@stanfordEELS/4DSTEM analysis in Digital MicrographEELS/4DSTEM analysis in Digital Micrograph, hosted by Roy Kim, TEM staff at Stanford Universityhttps://youtu.be/WBECGJkEt48Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/BackgroundDigital MicrographVideo (YouTube, etc)
nano@stanfordData processing with Digital MicrographData Processing with Digital Micrograph, hosted by Roy Kim, TEM staff at Stanford Universityhttps://youtu.be/YMOBxEQ8-0cMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordEnergy-dispersive X-ray spectroscopy (EDS) in TEM and STEMEDS in TEM and STEM, hosted by Ann Marshall, TEM staff at Stanford University.https://youtu.be/UIZLD7sV724Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordedX: Introduction to Scanning Electron MicroscopyScanning electron microscopy (SEM) is imaging technique in which an image can be produced by scanning a probe formed of electrons across the surface of a sample. Compared to conventional light microscopy, electrons have much shorter wavelength, enabling much higher resolution images with much larger depth of focus. In the light microscopy and SEM images below, compare the amount of detail and depth of focus (also known as depth of field). The purpose of this web module is to prepare new users to take the hands-on training to operate the FEI Sirion SEM at SNSF. https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/060b0c34ca4e407eb7fb4d143ba2b90b/9d8dfed83a6a43eeaab4e0f4ad27d327/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%409d8dfed83a6a43eeaab4e0f4ad27d327Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)TrainingyesMagellan SEMOnline course (edX, Coursera, Canvas)
nano@stanfordedX: Optical Microscopes OverviewGeneral overview of microscopeshttps://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/060b0c34ca4e407eb7fb4d143ba2b90b/e37e6c06de7345bfa7e5b1fb93fa3478/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%40e37e6c06de7345bfa7e5b1fb93fa3478Microscopy / Imaging (SEM, TEM, FIB, optical, AFM)Intro/Backgroundyesn/aOnline course (edX, Coursera, Canvas)
nano@stanfordedX: Keyence VK-X Series 3D Laser Scanning Confocal MicroscopeThe Keyence VK-X Series 3D Laser Scanning Confocal Microscope provides non-contact, nanometer-level profile, roughness, and film thickness data on any material. The lateral resolution of the microscope is 120 nm using the 408 nm violet laser light. The microscope scans the surface using a 16-bit photomultiplier to receive the reflected laser light. The instrument is able to provide highly accurate 3D measurement data over any shape of materials and steep angles (up to 88 degree angle of detection). High-resolution optical images can be acquired with resolutions up to 21.6 million pixels through 3CCD pixel shifting technology. High dynamic range (16-bit resolution color gradation) function automatically recognizes bright and dark areas as well as low contrast areas.https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/060b0c34ca4e407eb7fb4d143ba2b90b/6d1e30842d3849c6836a8481dab8e2bb/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%406d1e30842d3849c6836a8481dab8e2bbMicroscopy / Imaging (SEM, TEM, FIB, optical, AFM)TrainingyesKeyence VK-X Series 3D Laser Scanning Confocal MicroscopeOnline course (edX, Coursera, Canvas)
nano@stanfordOperating Thermco-ox furnaceIntroduction to operating the Thermco-Ox Furnace at Stanford Nanofabrication Facility (SNF).https://www.youtube.com/watch?v=5eD2T4IdjAM&Oxidation and AnnealingTrainingThermco oxide FurnaceVideo (YouTube, etc)
nano@stanfordYES Prime OvenThe YES prime oven dehydrates the wafers at 150ºC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.https://www.youtube.com/watch?v=5I_WtbDLvYYLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingYES Prime OvenVideo (YouTube, etc)
nano@stanfordManual developmentOverview of how to manually develop a 4 inch silicon wafer once it has been exposed. Filmed at SNFhttps://www.youtube.com/watch?v=zK9S_p5tteULithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Trainingn/aVideo (YouTube, etc)
nano@stanfordManual Spin Coat - Pipette MethodDemonstration of how to pour and coat resist using a pipette onto a 4 inch wafer using a Headway manual resist spinner.https://youtu.be/UHBSSfHk-KsLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Trainingn/aVideo (YouTube, etc)
nano@stanfordManual Spin Coat - Beaker MethodDemonstration of how to pour and coat resist using a beaker onto a 4 inch wafer using a Headway manual resist spinner.https://youtu.be/TqXF7bB3ixELithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Trainingn/aVideo (YouTube, etc)
nano@stanfordAutomated Wafer Development (SVG Develop)Automated wafer development on the SVG Developer at Stanford Nanofabrication Facility (SNF).https://www.youtube.com/watch?v=iipio2r5z0k&t=56sLithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)TrainingSVG Developer Video (YouTube, etc)
nano@stanfordedX: Introduction to LithographyThis course covers the basic concepts of photolithography, with focus on general information helpful to orient the learner to understand lithography in a lab and/or cleanroom setting. It should be noted that this is not an exhaustive list of processing steps, and each process module is subject to change depending on the specific aims of the project. https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/fcc7a069f4bd4294b48cba3e7c4429a3/ad9aa5d945fd4d15b4b784cf64817426/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%40ad9aa5d945fd4d15b4b784cf64817426Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)Intro/Backgroundyesn/aOnline course (edX, Coursera, Canvas)
nano@stanfordProf. Saraswat - Cleanliness, Contamination & Chemical HandlingProf. Saraswat discusses cleanliness, contamination, and chemical handling in the Stanford Nanofabrication Facility. (2010)https://www.youtube.com/watch?v=bN_tVgaJHzMProcessing (Wet Bench)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordWet Bench DiffusionThe Wet Bench Clean-1 and 2 is used for cleaning 3", 4", and 6" silicon, silicon germanium, or quartz wafers prior to processing in diffusion furnaces, LPCVD furnaces or before metal deposition. The cleans performed here are high quality, final cleans which precede high temperature processing. To be processed at this station, wafers may not contain or have ever contained any metals, nor been exposed to equipment which may pose this contamination risk. This station contains 2 sets of SC1 (5:1:1 H2O:H2O2:NH4OH) for removal of trace organics and SC2 (5:1:1 H2O:H2O2:HCl) for removal of trace metal ions, HF tanks (50:1 HF, and 6:1 BOE) for oxide etching in addition to dump rinse and spin-rinse-dry modules.https://www.youtube.com/watch?v=di5JvpSIQhEProcessing (Wet Bench)Trainingn/aVideo (YouTube, etc)
nano@stanfordTeflon-coated Metal Tweezers CleaningGuide on how to clean Teflon-coated metal tweezers at Stanford Nanofabrication Facility (SNF).https://www.youtube.com/watch?v=S9Om_qlw-CAProcessing (Wet Bench)Intro/Backgroundn/aVideo (YouTube, etc)
nano@stanfordWet Bench CleanWet Bench 1 & 2 training video at Stanford Nanofabrication Facility (SNF).https://www.youtube.com/watch?v=jL4RJ1gMZ-M&list=PLaWbUJn2CJH_p3mts52-pVjYQEWwADr4H&index=8&t=11sProcessing (Wet Bench)Trainingn/aVideo (YouTube, etc)
nano@stanfordedX: Introduction to X-ray Photoelectron SpectroscopyX-ray photoelectron spectroscopy (XPS) is a surface-sensitive spectroscopic technique that can give quantitative elemental composition information on a wide variety of samples. The purpose of this web module is to prepare new users to take the hands-on training to operate the PHI v1 XPS at SNSF. This is a high-level primer and not an exhaustive course on XPS; for those interested in diving deeper, many texts exist.https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/courseware/ba13f23503f4456bbbe04f1c81f3b49d/1b5dc95320d1463d812d36af1a729f15/?activate_block_id=block-v1%3AStanfordOnline%2BENGRX0001%2B1T2020%2Btype%40sequential%2Bblock%401b5dc95320d1463d812d36af1a729f15X-Ray (XRD, XPS, XCT)TrainingyesPHI VersaProbe IIIOnline course (edX, Coursera, Canvas)
Self-Assembly Schemes for the Fabrication of Inverse Opals
The nanoscribe can be used to create template structures for particle self assembly, and details about inverse opal BCC and FCC structures are described.
Lithography/Photolithography (Resist, Exposure, Develop, Oven/Hotplate)
Training - more specific information focused on a tool and/or processing or recipes for that tool
TrainingNanoscribePDF / Word Doc
Lesker2 Sputter TiN Initial Development
Our goal was to develop a process for sputtering of NVM-quality TiN using the new Lesker sputtering tool (Lesker-2) that resides inside the cleanroom. This tool can achieve the high-vacuum pressures necessary for TiN films with low levels of oxygen contamination.
Deposition (Metallization)
Training - more specific information focused on a tool and/or processing or recipes for that tool
TrainingLesker 2PDF / Word Doc
nano@stanfordSOP - Niobium structures releasing
We worked out a method for releasing niobium structures with high yield.
Processing (Wet Bench)
Training - more specific information focused on a tool and/or processing or recipes for that tool
TrainingPDF / Word Doc
nano@stanfordCritical Point Drying SOP
The basic version of the Standard Operating Procedures for this tool is already available online but we propose a modified version that ensures higher yield of successful releasing and better overall cleanliness of the process on small chips
Processing (Wet Bench)
Training - more specific information focused on a tool and/or processing or recipes for that tool
TrainingPDF / Word Doc
nano@stanfordPost-metal etch clean
Procedures for troubleshooting post Nb-etch residues on Sapphire wafers are described.
Processing (Wet Bench)
Training - more specific information focused on a tool and/or processing or recipes for that tool
TrainingPDF / Word Doc