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List of ALD reviews for the ALD History Review (#10 in the VPHA Publication Plan)
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* Main file: VPHA-ALD-reviews, find link through http://vph-ald.com/VPHAopenfiles.html
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http://vph-ald.com/VPHAopenfiles.html
https://docs.google.com/spreadsheets/d/1RwwaxQHSGpr3ClquwincqBif1VgVdY9xLdXySJ1maVI/
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* Please check first if the thesis is already in the list in the main file
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* If it is not there, please add here information of the thesis that should be added to the main file - preferably as complete as possible
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Anyone can edit this file
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YearDate published
Type:
Review / essay / inbook (= book chapter) / book / lecture notes / ...
Author(s) TitleReference# of
pages		# of
references		Internet linkOther info (such as ISBN no.)Source of dataTimes cited
(ISI WoS)		ISI WoS,
date checked		NotesCC license?
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1994reviewF.H. Ribeiro, G.A. SomorjaiThe fabrication of “high‐technology” catalysts
Journal of the Royal Netherlands Chemical Society 113 (1994) 107-115
https://doi.org/10.1002/recl.19941131002
see https://twitter.com/rlpuu/status/1355557408391749634
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2021reviewVasilyev, Vladislav Yu
Review-Atomic Layer Deposition of Silicon Dioxide Thin Films
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY Volume: 10 Issue: 5 Article Number: 053004
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2020doctoral thesisLifeng zhang
Heterogeneous Catalyst Design and Synthesis with Controlled and Well-Defined Strategies
https://www.proquest.com/openview/8caa88fb9243f9d1991fdbb1c845e09e/1?pq-origsite=gscholar&cbl=18750&diss=y
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Cite this: Chem. Mater. 2020, 32, 21, 9056–9077
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2020
digital encyclopedia chapter
Lilit Ghazaryan,Kristin Pfeiffer,Paul Schmitt,Vivek Beladiya,Stefan Kund,Adriana Szeghalmi
Atomic Layer Deposition
https://doi.org/10.1002/3527600434.eap813
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2021review
Sosnov, EA; Malkov, AA; Malygin, AA
Nanotechnology of Molecular Layering in Production of Inorganic and Hybrid Materials for Various Functional Purposes: II. Molecular Layering Technology and Prospects for Its Commercialization and Development in the XXI Century
Russian Journal of Applied Chemistry 94 (2021) 1189-1215
https://doi.org/10.1134/S1070427221090020
rlp
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2021review
Sosnov, EA; Malkov, AA; Malygin, AA
Nanotechnology of Molecular Layering in Production of Inorganic and Hybrid Materials for Various Functional Purposes (a Review): I. History of the Development of the Molecular Layering Method
Russian Journal of Applied Chemistry 94 (2021) 1022–1037
https://doi.org/10.1134/S1070427221080024
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