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List of ALD reviews for the ALD History Review (#10 in the VPHA Publication Plan)
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* Main file: VPHA-ALD-reviews, find link through http://vph-ald.com/VPHAopenfiles.html
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http://vph-ald.com/VPHAopenfiles.html
https://docs.google.com/spreadsheets/d/1RwwaxQHSGpr3ClquwincqBif1VgVdY9xLdXySJ1maVI/
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* Please check first if the thesis is already in the list in the main file
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* If it is not there, please add here information of the thesis that should be added to the main file - preferably as complete as possible
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Anyone can edit this file
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Year
Date published
Type:
Review / essay / inbook (= book chapter) / book / lecture notes / ...
Author(s) TitleReference# of
pages
# of
references
Internet link
Other info (such as ISBN no.)
Source of data
Times cited
(ISI WoS)
ISI WoS,
date checked
NotesCC license?
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1994reviewF.H. Ribeiro, G.A. Somorjai
The fabrication of “high‐technology” catalysts
Journal of the Royal Netherlands Chemical Society 113 (1994) 107-115
https://doi.org/10.1002/recl.19941131002
see https://twitter.com/rlpuu/status/1355557408391749634
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2021reviewVasilyev, Vladislav Yu
Review-Atomic Layer Deposition of Silicon Dioxide Thin Films
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY Volume: 10 Issue: 5 Article Number: 053004
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Cite this: Chem. Mater. 2020, 32, 21, 9056–9077
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