IBD Ta2O5 Data 2016-1hr depositions

	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y	Z
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Avg Index	Index+1%	Index -1%	Dep. Rate	Avg.dep.rate	Avg+5%	Avg-5%	HF e.r.	Stress	Avg. Stress	Avg+10%	Avg-10%	LPD (light point defects)		Comment	Mike Silva	Depositions:
2	01/01/14	User	SiO2	1_Ta2O5Dep	(sec)	(A)	Index @632.8nm	Index @1550nm	Index @632.8nm			(nm/min)	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(MPa)	(MPa)	(MPa)	(MPa)	LPD before deposition	LPD after deposition

3				Ta2O5			Index		Avg.Index	Index+1%	Index-1%	Dep.rate	Avg, Dep.rate	Avg.+5%	Avg.-5%		Stress	Avg.Stress	Avg+10%	Avg.-10%			40degree able fixture
4	02-27-15	Bilja	Ta2O5	Bilja_Ta2O5_dep	3600	4258.12	2.167	2.127	2.171	2.192	2.149	7.10	8.14	8.55	7.73	0.71	-235.22	-206.60	-227.26	-185.94	315	5278	sandblasted carrier
5	11-19-15	Bilja	Ta2O5	Bilja_Ta2O5_dep	3401	5170.86	2.178	2.134	2.171	2.192	2.149	9.12	8.14	8.55	7.73	4.09	-231.30	-206.60	-227.26	-185.94	43	424	Thickness might be recalulated to 1hr dep.		Deposition run in 2 attempts
6	02-01-16	Bilja	Ta2O5	Bilja_Ta2O5_dep	2862	4954.75	2.174	2.132	2.171	2.192	2.149	10.39	8.14	8.55	7.73	6.36	-196.55	-206.60	-227.26	-185.94	54	2203	Thickness might be recalulated to 1hr dep., rproblem running dep.		By misteke run 47min dep.
7	03-21-16	Bilja	Ta2O5	Bilja_Ta2O5_dep	659.2	831.88	2.162	2.109	2.171	2.192	2.149	7.57	8.14	8.55	7.73	0.30	-137.18	-206.60	-227.26	-185.94			Thickness might be recalulated to 1hr dep., problem running dep.		Deposition run in 4 attempts
8	03-24-16	Bilja	Ta2O5	Bilja_Ta2O5_dep	3600	4363.50	2.171	2.114	2.171	2.192	2.149	7.27	8.14	8.55	7.73	0.41	-194.37	-206.60	-227.26	-185.94			BHF 1 min, recipe modified( as Ben Y.)
9	05-23-16	Bilja	Ta2O5	Bilja_Ta2O5_dep	3600	4436.30	2.172	2.129	2.171	2.192	2.149	7.39	8.14	8.55	7.73		-244.97	-206.60	-227.26	-185.94	49	231
10
11					Avg.Th.for 1hr depo.	4258.12									Avg HF e.r.	2.37
12						Avg. Index	2.171	2.124			Avg. Dep.Rate	8.14				Avg Stress	-206.60
13						Avg+1%	2.192	2.145			Avg+5%	8.55				Avg+10%	-227.26
14						Avg-1%	2.149	2.103			Avg-5%	7.73				Avg-10%	-185.94
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100