Thickness uniformity-Adv. PECVD STD Nitride2 2021

	B	C	D	E	F	G	H	I
1
2		Thickness, A		Index @632.8nm		Thickn. Uniformity, %	Comment	Observation
3		Max	Min	Min	Max
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	12-02-19	2296.53	2260.90	1.970	1.971	99.22	Film thicker in the center	Should be thinner in the center as all other nitrides!
6	11-03-20	2323.30	2309.90	1.974	1.982	99.71	Film thicker in the center
7	01-04-21	2199.69	2194.38	1.984	1.976	99.88	Film thicker in the center
8	02-23-21	2149.80	2142.27	1.977	1.976	99.82	Film thicker in the center
9	04-19-21	2295.80	2286.60	1.973	1.973	99.80	Film thicker in the center
10	06-15-21	2196.73	2182.93	1.975	1.975	99.68	Film thicker in the center
11
12
13
14
15
16
17	Average	2243.64	2229.50	1.976	1.976	99.69
18	Avg.+2%	2288.51	2274.09	2.015	2.015
19	Avg.-2%	2198.77	2184.91	1.936	1.936
20	Max	2323.30	2309.90	1.984	1.982	99.88
21	Min	2149.80	2142.27	1.970	1.971	99.22
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52