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(depends on tech node)**DO NOT EDIT
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Die Size (cm2)Mean Defect Density
D0 (defects/cm2)
Poisson Model
Murphy: Even Distribution
Murphy: Triangle Distribution
Seeds Model# of crit layers
Defect Density
DD (defects/inch2/layer)
Defect Density
DD (defects/cm2/layer)
Bose-Einstein Model
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10.00199.9%99.9%99.9%99.9%35.50.0010.0196.5%
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0.0595.1%95.2%95.1%95.2%0.0020.0193.2%
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0.190.5%90.6%90.6%90.9%0.0030.0289.9%
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0.1586.1%86.4%86.2%87.0%0.0040.0386.8%
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0.281.9%82.4%82.1%83.3%0.0050.0383.8%
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0.2577.9%78.7%78.3%80.0%0.0060.0480.9%
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0.374.1%75.2%74.6%76.9%0.0070.0578.1%
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0.3570.5%71.9%71.2%74.1%0.0080.0575.4%
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0.467.0%68.8%67.9%71.4%0.0090.0672.8%
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0.4563.8%65.9%64.8%69.0%0.0100.0670.2%
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0.560.7%63.2%61.9%66.7%0.0110.0767.8%
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0.5557.7%60.6%59.2%64.5%0.0120.0865.5%
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0.654.9%58.2%56.5%62.5%0.0130.0863.2%
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0.6552.2%56.0%54.1%60.6%0.0140.0961.0%
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0.749.7%53.8%51.7%58.8%0.0150.1058.9%
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0.7547.2%51.8%49.5%57.1%0.0160.1056.9%
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0.844.9%49.9%47.4%55.6%0.0170.1155.0%
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0.8542.7%48.1%45.4%54.1%0.0180.1253.1%
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0.940.7%46.4%43.5%52.6%0.0190.1251.3%
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0.9538.7%44.8%41.7%51.3%0.0200.1349.5%
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136.8%43.2%40.0%50.0%0.0210.1447.8%
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** trying getting ARIMA
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numbers from this link
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5nm = 35.5
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7nm = 32.5
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(some examples)
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