4.30 AR3-600 (BARC) (0.06 um)
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4.30 - AR3-600 (BARC) (0.06 um) on (svgcoat3)
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Description:This monitor tracks the standardized 600 Å thick AR3-600 resist process including: 1) As coated thickness 2) visual appearance/quality Output Response
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ResponseDescription
Target (Å)
USL (Å)LSL (Å)
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Tool:(svgcoat3)As Coated Thickness:5 point average of measurements taken at 2.5 cm intervals from wafer edge along X- and Y-axis after BARC is coated. Nanospec program 117 AR3 on Si600650550
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Resist and Developer:AR3-600 (BARC) photoresist
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Mask:Not applicable
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Up-stream:Starting wafer is bare SiProcess Performace
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Down-stream:Wafer is inspected and then retired
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Tool Specifications
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StepToolSettings
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4.30.1 - Coat (svgcoat3)Programs (3,3)
Coat at 3750 rpm for 30 sec., 190 C contact softbake for 60 sec.
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4.30.2 Visual inspection(svgcoat3)Coated wafers are inspected and sorted into one of three appearance categories: foggy, particles, or good. Foggy BARC wafers appear more opaque and lighter colored. Particles indicates the wafers have visible white particles scattered across the surface. Good wafers are those that have a uniform, dark surface, without either of the two previously mentioned defects.
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4.30 AR3-600 (BARC) (0.06 um): Visual Quality
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DateGoodFoggyParticlesOther
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4.30.3 Thickness measurement
(nanospec)Only "good" wafers are used for thickness measurements, wafers with foggy BARC or particles are recycled. 12-07-18yesnonono
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