4.20 AR3-600 (BARC) (0.06 um)

	A	B	C	D	I	J	K	L	M	N	P	Q	R	S
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3		4.20 - AR3-600 (BARC) (0.06 um) on (svgcoat3)
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5		Description:	This monitor tracks the standardized 600 Å thick AR3-600 resist process including: 1) As coated thickness 2) visual appearance/quality		Output Response
6		Description:			Response		Description					Target (Å)	USL (Å)	LSL (Å)
7		Tool:	(svgcoat3)		As Coated Thickness:		5 point average of measurements taken at 2.5 cm intervals from wafer edge along X- and Y-axis after BARC is coated. On msp300, use file BARC for layer stack.					600	650	550
8		Resist and Developer:	AR3-600 (BARC) photoresist		As Coated Thickness:							600	650	550
9		Mask:	Not applicable
10		Up-stream:	Starting wafer is bare Si		Process Performance
11		Down-stream:	Wafer is inspected and then retired
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13		Tool Specifications
14		Step	Tool	Settings
15		4.30.1 - Dehydrate	(svgcoat3)	Programs (9,3) 190 C contact bake for 60 sec. Optional, perform when dummy BARC run appears "foggy"
16		4.30.1 - Dehydrate	(svgcoat3)
17		4.30.1 - Coat	(svgcoat3)	Programs (3,3) Coat at 3750 rpm for 30 sec., 190 C contact softbake for 60 sec.
18		4.30.1 - Coat	(svgcoat3)
19		4.30.2 - Visual inspection	(svgcoat3)	Coated wafers are inspected and sorted into one of three appearance categories: foggy, particles, or good. Foggy BARC wafers appear more opaque and lighter colored. Particles indicates the wafers have visible white particles scattered across the surface. Good wafers are those that have a uniform, dark surface, without either of the two previously mentioned defects.
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21					4.30 AR3-600 (BARC) (0.06 um): Visual Quality
22					Date	Dehydrated		Good Coat		Foggy Appearence	Particles		Other
23		4.30.3 - Thickness measurement	(nanospec)	Only "good" wafers are used for thickness measurements, wafers with foggy BARC or particles are recycled.	6/23/2026	yes		yes		no	no		svg3coat3
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27					Quality'!C8	Quality'!D8	Quality'!E8	Quality'!F8	Quality'!G8	Quality'!H8
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