PML_Equipment Downtime_Maintenance Log
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PHOPML: Basement Precision Measurement Lab Equipment Maintenance Downtime Log
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Color Code DefinitionsDOWN - Equipment not usable
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UP - Equipment is operational
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Partially Operational - Equipment may be usable contact Lab Manager
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DateEquipmentStatusFollow on NotesSystem Update
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09/06/12JEOLupthe non stop low volume alarm sound was due to low battery capacity, and the batteries were replacedservice completed
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09/04/12JEOLdownAlarm sound due to ground wire connection to external feed through, and wouldn't stopwaiting for service
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05/30/12Supra 55VPup EBL installed, and completed. Still needs to do test runservice completed
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05/25/12JEOL upMay 18 problem addressed, Routin maintenance completedservice completed
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05/24/12Supra 55VPdownEBL upgrade service in progress
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05/18/12JEOLdownx-axis stretched, need recal, contrast near max out waiting for service
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04/23/12Supra 55VPuptip was replaced, Raith was faulty and will reschedule for the installationservice completed
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04/03/12JEOLupPMT replaced, and pump oil filled upservice completed
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03/30/12JEOL downcontrast max out, very noisywaiting for service
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03/23/12Supra 55VPdownRaith ebeam blanker and NPGS installation, replace aperture setservice in progress
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02/03/12Supra 40VPupNPGS hard drive restored, a backup drive was installedservice completed
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01/30/12Supra 40VPonly imaging
EBL is down
NPGS computer hard drive failureIT service in progress
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01/06/12Supra 55VPuptip and aperture replaced, vac board and Zeiss PC replaced
EDAX only spectrum works, not mapping
Zeiss service completed
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12/08/11Supra 55VPdowntip failed, PC hard drive failedservice in progress
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11/07/11Supra40VPupjoystick pad replacedservice completed
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11/04/11Supra40VPdownjoystick pads doesn't respond, waiting for servicepart on order
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11/01/11Supra55VPupbroken stage part replacedservice completed
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10/04/11Supra 55VPdownstage parts damaged, need multiple parts from manufacturewaiting for parts
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08/11/11Supra 40VPupRaith blanker replacedservice comopleted
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08/05/11Supra55VPpartially operationalZeiss software (user files and loadlock macro) problems solved, imaging is functional. Communication to EDAX is not up yet, EDAX is downwiting for EDAX service
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08/05/11Supra 40VPpartially operarional blanker wire part replaced, system bakeout completed, imaging is functional. Raith blanker not working, waiting for replacement.waiting for part
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08/01/11Supra 40VPdownwire connected to blanker plate replaced; being baked out for 60 hoursservice in progress
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08/01/11Supra55VPdowncommunication issues in loading Zeiss software; IT and Zeiss service are working on itservice in progress
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07/29/11Supra 55VPdownHard drive needs to be reformated, IT is working on it.
Zeiss service needs to reload software afterwards
service in progress
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07/29/11Supra 40VPdownfeedthrough of Raith replaced, still not working. Found wire connected to blanker plate was damagedpart on order
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07/22/11Supra 40VPdowncolumn power supply to 8KV was faulty, also insulator at Raith feedthrough not proper which caused arcing parts being ordered
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07/22/11Supra 55VPupIT is still working on PC attacked by virus, but functional with new user password
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07/21/11JEOL upJEOL is in working conditionservice completed
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07/18/11JEOL downdisplay monitor quitwiatin for service
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07/18/11Supra55VPupPump was fixed, some software issue, the computer was slowservice completed
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07/15/11Supra 55VPdownvac control board replaced, pump still not workingwaing for service
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07/13/11Supra 55VPdownpump not working, gun vacuum low waiting for service
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07/11/11Supra 40VPupstage board and joy stick pad were replaced. Zeiss
repeatability test past
service completed
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06/24/11Supra 40VPoperational with
stage problem
Raithe blanker replaced, y-lead screw replaced, hard panel replaced,
stage problem still exists for EBL
waiting for service
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06/17/11Supra 40VPdownRaith failed (beam arcing, focusing problem)service in progress
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05/13/11Supra 40VPoperational with stage problem Stage problem recurred, imaging OK but EBL not acurateservice in progress
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05/05/11Zeiss Supra 40VPupthe stage problem was repairedservice completed
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05/02/11Zeiss Supra 40VPdownstage lockup during initializationwaiting for service
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04/25/11Dimension AFMupthe piezo was replaced and shipped back service completed
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03/15/11Dimension AFMdownbroken piezo, needs to ship afm back to replace itin service
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03/08/11Dimension AFMuplaser adjusting knobs repaired from vender, but still not working. Additional repair of exterder box needed.service completed
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01/17/11Zeiss Supra 40VPdownstage got stuck in Y Axiswaiting for service
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12/22/10Dimension AFMdownlaser adjusting knobs not workingneeds to ship back to Vender for repair
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12/03/10Zeiss Supra 40VPUPNoise promblems remianed after bake out. Service found the Raith blanker which was replaced end of September, was faulty. Service replaced the Raith and the tool is back functioning.service completed
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12/01/10Zeiss Supra 40VPdownservice did further cleaning in upper column, and baked out for 2 daysin service
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11/23/10Zeiss Supra 40VPoperational with intermitent problemservice only had time to repair stucked stage, the clicking and image shifting issue remain.waiting for more service
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11/22/10Zeiss Supra 40VPdownstage got stuck in Y Axiswaiting for service
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11/16/10Zeiss Supra 40VP
operational with intermitent problemintermitent imaging shifting resurfaced when using low KV, EBL at 30KV no problem. Service came in to replace one of the isolation damplers,
still hear clicking sound occasionally, may need to replace more dampers.
need additional service
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11/11/10Zeiss Supra 40VPup
Cap replaced, tip was centered, many parameters were realigned, and scroll pump was also replaced due to being noisy.service in progress
(needs islolation damper )
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11/9/2010Zeiss Supra 40VPpatially operational for EBL
waiting for service
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11/08/10Zeiss Supra 40VP down for service during daytime
partoally operational at night time for EBL
power supply was replaced, but found not the cause of problem.
Further diagnosis was performed by service, and contamination was one of major reasons
service in progress
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11/04/10Zeiss Supra 40VP
partially
operational for EBL
control-interface problem addressed (water level low in chiller), waiting for 8KV power supply service scheduled early next week
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11/04/10Zeiss Supra 40VPdowncontrol interface non-functional - and EBL and imaging are both downservice has been contacted, waiting for update on service
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10/29/10Zeiss Supra 40VPpartialy operationalimage shifted, wobbling, noise problem was diagnosed from a fauty 8KV power supply. Tool works good when using 20KV and above for EBL.waiting for part - to be installed 11/9/10
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10/27/10Zeiss Supra 40VP
downimage shifted, wobbling, noisewaiting for service
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10/02/10Zeiss supra 40VP
up gun isolation valve replaced, bake-out overnightservice completed
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09/24/10Zeiss Supra40VP
downRaith Beam Blanker was replaced on 23rd , but found gun vacuum not sufficient, waiting for service
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9/9/2010Zeiss Supra 40VP
partially operationalRaith beam blanker not working correctlydiagnosis in progress
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07/12/10Zeiss Supra 40VP
upone of the dampers was replacedservice completed
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07/05/10Zeiss Supra 40VPpartially
operatiional
clicking sounds from air pot leaking, image wobblingwaiting for
service
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06/29/10Zeiss Supra 40VPupPM and tip replacement completedservice completed
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06/25/10Zeiss Supra40VPdownPM and tip replacement
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05/19/10Zeiss Supra 40VP
upstage mannually lowered, VP detector was in touch with tall sample.
Ground cable temperarily connected, new one will be replaced later
service completed
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05/18/10Zeiss Supra 40VP
downstage touching, not able to initialize, ground cable brokenservice call placed
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05/10/10JEOL 6100upnitrogen gas line pressure not enough, correctedService Completed
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05/07/10JEOL 6100downrough pump failed waiting for service
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04/23/10Zeiss Supra 40VPUPIT installed flash drive scan program, and updated McAfee on both Zeiss and Nabity computers. Zeiss User files are still corrupted, It may need to create new account for each user.service completed
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04/16/10Zeiss Supra 40VPupZeiss computer hard drive replaced, software reloaded, there are still problems with user file setting possibly due to corrupted user files from old hard drive, Zeiss and ebl are functionalservice in progress
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04/14/10Zeiss Supra 40VP
downZeiss computer kept freezing up due to virus introduced from Flash drive by user, hard panal failed, and eventually failed hard driveservice in progress with IT and Zeiss
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03/25/10Zeiss Supra 40VPup
turbo pump, and vacuum controller replacedservice completed
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03/22/10Zeiss Supra 40VPdownvacuum not sufficient waiting for service
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02/25/10JEOL 6100upwater chiller was replacedservice completed
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02/10/10JEOL 6100downvacuum insuficient
waiting for service
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02/02/10Zeiss Supra 40VPupTurbo pump was bad, replaced with refurbished one by Zeiss
service completed
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02/01/10Zeiss Supra 40VPdownChamber not being pumped down properly
waiting for service
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01/17/10Zeiss Supra 40VPupservice came in same day, and fixed the frozed stageservice completed
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10/29/09Veeco AFM
Dimension
upafm computer is workingservice coompleted
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10/23/09Veeco AFM
Dimension
downcomputer virus problem from memory stickIT service in progress
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09/02/09Zeiss Supra 40VPupturbo pump replaced, air-leak noise fixedservice completed
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08/28/09Zeiss Supra 40VPdowntip replace and vibration, air-leak issues afterwardsservice in progress
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07/30/09JEOL 6100upParts were replaced, and TV mode is workingservice completed
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07/20/09Zeiss Supra 40VPupdirt and residues found on stage and moving device areaservice completed
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07/19/09Zeiss Supra 40VPdownStage doesn't move, and doesn' tinitialize
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06/25/09Zeiss Supra 40VPUPservice completed
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06/23/09Zeiss Supra 40VPDownrepair of stage "lock-up", stage motor replaced, tension tape both directions replaced, stage board replaced, new hard drive installedservice in progress
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06/16/09JEOL 6100downTV mode not workingservice in progress
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06/12/09Zeiss Supra 40VPPartially OperationalHard Panel replaced, new version of SMT software installedservice in progress
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06/08/09JEOL 6100UPIdentified possible cause. Parts are being ordered. It's funtioning at the momentparts on order
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06/05/09JEOL 6100downTV mode not working
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06/05/09Zeiss Supra 40VPPartially
operational
Hard Panel not functioning, no EBL communication
Imaging working by using mouse to do all functions
Service in progress
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05/18/09JEOL 6100DownTV mode blurry images, mag & scale bar not shown sometimesService call made
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05/13/09JEOL 6100UPproblems was addressedService call completed
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05/11/09JEOL 6100DOWNProblems with imagining. Service has been called.Service in progress
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05/04/09Zeiss Supra 40VPPartially OperationalRotation of the stage is not operational. Waiting for service and parts.Service in progress
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