6" Ebeam Accuracy Checks

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U
1		2019										2020
2		Aug		Sep		Oct		Nov		Dec		Jan		Feb		March		April		May
3	Material	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error	Thickness [nm]	% Error
4	Ti	100.8	0.80%			97.8	-2.20%					97.5	-2.50%	99.4	-0.60%
5	Cr	100.7	0.70%											100.1	0.10%
6	Ni	100.9	0.90%
7	Al													100.1	0.10%
8	Au			50.46	0.92%							51.6	3.20%
9	Pt
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100