New Data PECVD#1 300nm SiO2 film- Gain4 and Gain2 from August 2017

	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	AB
1		Film	Recipe	Subs.T	Thickness	Dep.time	JAW EC-400 (Woolam Spec. Ell.)		Dep.rate	Stress	BHF etch rate wafer	LPD (Gain4) particle size (0.16-1.6)um		LPD (Gain2) particle size (2.8-28.0)um		Photos	Photos	Comments/Brian Lingg PM
2																		Maintenance
3	1/1/2017	SiO2	SiO2_10	250° C	(Å)	sec	Index @ 632.8nm	Index @ 1550nm	( nm/min)	(MPa)	( nm/min)	Before Deposition	After Deposition	Before Deposition	After Deposition	Surfscan	Optical microscope	Deposition done on 4"Si wafer

4							Index		Dep.rate	Stress						Dropbox/Biljana/Photos/2017/Particles/PECVD#1	Biljana/Gmail account	Replaced the Silane and Ammonia MFCs-Avg-2017
5	08-07-17	SiO2	SiO2_30	250	3156.11	439.0	1.460	1.449	43.14	-357.19	678.24	4	122	no data	no data	no particles	no photos	BHF=30sec
6	08-22-17	SiO2	SiO2_30	250	3161.86	439.0	1.460	1.449	43.21	-369.31	681.56	29	301	47	76	no particles	DF-no big particles	a lot of small particles, BHF=30sec
7	09-05-17	SiO2	SiO2_30	250	3159.29	439.0	1.464	1.453	43.18	-420.00	695.49	25	135	6	95	no particles	DF-no big particles	some small particles, BHF=20sec
8	10-23-17	SiO2	SiO2_30	250	3204.68	439.0	1.460	1.449	43.80	-363.14	589.65	121	340	20	94	no particles	DF-no big particles	BHF=30sec, almost all etched in 30sec
9	11-15-17	SiO2	SiO2_30	250	3130.34	439.0	1.461	1.450	42.78	-374.39	803.30	23	68	18	28	no particles	DF-no big particles	very nice, uniform film, 15sec BHF
10	12-01-17	SiO2	SiO2_30	250	3197.95	439.0	1.471	1.460	43.71	-374.39	911.42	140	264	20	58	no particles	DF-no big particles	15sec BHF
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16				Avg.Thickness	3168.37	Avg Index	1.463	1.452
17						Index+1%	1.477	1.466
18						Index-1%	1.448	1.437
19								Avg Dep.Rate	43.30
20								Avg +10%	47.63
21								Avg - 10%	38.97
22									Avg. Stress	-376.40
23									Avg +30%	-489.32
24									Avg - 30%	-263.48
25										Avg. HF e.r.	726.61
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