6.10 Evaporator Overview
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PVD Evaporation Chart
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Thermal EvaporationElectron Beam Evaporation
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Marvell Equipment NamenrcTescalebeam1ultek2CHAAST-ebeamMarvell Equipment Name
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Marvell Nanolab Manual Chapter
6.116.166.176.156.126.13
Marvell Nanolab Manual Chapter
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Marvell Nanolab Location582582582582582582Marvell Nanolab Location
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Equipment ModelNRC 3117Custom-SolutionPEVA-IIEquipment Model
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Equipment VendorVarian/NRCTescalNanolabPrecision Scientific Co.CHA industriesASTEquipment Vendor
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Number of sources2 boats3 boats6 crucibles - rotary3 crucibles - linear6 crucibles - rotary4 crucibles -rotaryNumber of sources
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Target/ Source MaterialTCOVery High TempExtreme Temp & MagneticsHigh tempHigh tempReactive E-beamTarget/ Source Material
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Substrate CoolingNoNoNoYesNoNoSubstrate Cooling
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Substrate HeatingYesNoNoNoYesSubstrate Heating
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Thickness MonitorQCMQCMQCMQCMQCMQCMThickness Monitor
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PlatformBell Jar w/ hoistBell Jar w/ HoistChamber w/DoorBell Jar w/HoistChamber w/DoorChamber w/DoorPlatform
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Wafer LoadsingleVariesthreesingleThree12x 6" wafersWafer Load
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Base Pressure~7 E-7 Torr2E-7 Torr2E-7 Torr2 E -6 Torr2E-7 Torr2E-7 TorrBase Pressure
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Typical Process PressureVariableVariableVariableVariableVariableVariableTypical Process Pressure
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Material disallowed in toolTcont < 900Tcont < 900Tcont < 900, MagnetTcont < 900, MagnetTcont < 900, MagnetMaterial disallowed in tool
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Unique ProcessITO
Ferromagnetic dep from E-beam
NoneNone
Reactive E-beam, planetary coat
Unique Process
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Unique FeatureO2 or N2 Process GasDep. ControlRobust thermal resistance
Wafer Angle, Cooled chuck
Ion Mill, Dep. ControlO2 Process Gas, PlanetaryUnique Feature
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ChamberChamber
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RotationNoNoPlanetaryNoYesPlanetaryRotation
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Wafer Capabilityup to 6"
4", 6", 8" (Fixture needed)
4", 6"4", 6"Chips, 4", 6"4", 6"Wafer Capability
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Substrate HeaterRadiantNoNoneNoneNoneRadiantSubstrate Heater
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SourceSource
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Heat MethodResistive elementResistive elemente-gune-gune-gune-gunHeat Method
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Boat/crucible sizeTungsten Boat/WireTungsten Boat/Wire15cc crucible6 ml. crucible
15cc/9cc/3.9cc reducer
15 cc cruciblesBoat/crucible size
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Source Material ChangeBy usersBy usersBy usersBy UsersBy UserSource Material Change
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Power SupplyNoneHVC 10kW supplyNoneSR-10 Triode 10kWTT-6 6kWPower Supply
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VacuumVacuum
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High VacPumpCryoCryoCryoCryoCryoCryoHigh VacPump
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Backing PumpOil PumpOil PumpOil PumpOil PumpDry PumpOil PumpBacking Pump
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GasesGases
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ArNoneNoNoneNoneYes, for premillNoAr
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N2
Yes, Piezoelectric valve
Yes, for ventYes- for ventYes- for ventYes, for ventYes - For VentN2
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O2
Yes, Piezoelectric valve
NoNoneNoneNoneYes - For ProcessingO2
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