IBD SIO2 Thickness uniformity 2015-1hr dep

	A	B	C	D	E	F	G
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2		Thickness, A		Index @632.8nm			Comment
3	Date	Min	Max	Max	Min	Thickness Uniformity, %
4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	02-27-2015	3461.75	3532.91	1.492	1.489	98.98	Thinner in the center
6	04-10-2015	3202.73	3278.32	1.493	1.493	98.83	Thinner in the center
7	04-30-2015	3129.23	3227.86	1.493	1.493	98.45	Thinner in the center
8	06-15-2015	3067.08	3182.95	1.498	1.498	98.15	Thinner in the center
9	10-13-2015	3052.23	3085.14	1.495	1.495	99.46	Thinner in the center
10	11-19-2015	2662.99	2746.98	1.494	1.494	98.45	Thinner in the center
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12	Average					98.75
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