ABCDEFGHIJKLMNOPQRSTUVWXYZ
1
UC Berkeley Marvell NanoLab Wafer Specs
2
NL SkuSizeDescTypeOrientationResistivityGrade
Thickness
Finish:Flatssurface roughness
contamination / particles
S/D "scratch dig"
Bow/WarpTTVTransmission
3
702554P-Type Test, virgin SiP1-0-01-50 ohm cmTest475-575 µmSSP2 semi std flats
4
702524P-Type Prime, virgin SiP1-0-010-30 ohm cmPrime500-550 µmSSP2 semi std flats
5
702514N-Type Prime, virgin SiN1-0-01-20 ohm cmPrime500-550 µmSSP2 semi std flats
6
702504P-Type, virgin SiP1-0-05-10 ohm-cmPrime525±25µmDSP2 semi flats
7
703846P-Type, virgin SiP1-0-01-10 ohm-cmPrime675±25µmDSP1 semi std primary flat
8
702596P-Type Test, virgin Si. **Transitioning to NL Specific sequential scribing**P1-0-01-50 ohm cmTest600-700 umSSP1 semi std primary flat<5A>0.3μm: <=20≤40μmTTV≤ 10μm
9
702576P-Type Prime, virgin Si. **Transitioning to NL Spesific sequential scribing**P/B1-0-010-30 ohm cmPrime650-700 µmSSP1 semi std primary flat<2A>0.3μm: <=20≤40μmTTV≤ 10μm
10
702566N-Type Prime, virgin SiN1-0-010-30 ohm cmPrime650-700 µmSSP1 semi std primary flat
11
704158P-Type TEST, Virgin Si. **Transitioning to SEMI M13 LASERMARK ON BACKSIDE**P/B1-0-01-100 ohm-cmTEST725±25μmSSPOne semi Notch≤0.5nm>0.3μm: <=10≤40μmTTV≤ 10μm
12
704168P-Type PRIME, Virgin Si - **Transitioning to Semi M13 - FRONT SIDE LASER MARK**P/B1-0-010-30 ohm-cmPRIME725±25μmSSPOne semi Notch≤0.5nm≤50@0.16μm≤40μmTTV≤ 5μm
13
702534Fused SilicaPrime500±25μmDSP w/ Bevel1 semi std primary flat 32.5± 2mm40/20≤20μm≤5μmJGS2
14
703606Fused SilicaPrime500±25μmDSP w/ Bevel1 semi std primary flat40/20≤40µm≤10µmJGS2
15
702614BoroFloatPrime500±25μmDSP, rounded edge1 semi std primary flat, 32.5 ± 2 mm40/20≤15µm≤5µm
16
703486BoroFloatPrime500±25μmDSP w/ Bevel1 semi std primary flat, 57.5± 2mm40/20≤25µm≤10µm
17
18
Note: NanoLab offers wafers with one major flat (SEMI standard) due to the fact that the majority of our automated equipment are set up to accept wafers with single flat, only (no minor flat).
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100