4.20 Ksaligner Lamp Intensity Monitor (i-line & g-line)

	B	C	E	F	G	I
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4	4.20 - Intensity Measurements on Ksaligner
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6	Description:	This monitor tracks lamp intensity on ksaligner. Measurements include center, top, flat, right, and left intensity readings taken with a handheld intensity meter. These readings are used to calculate a 5-point mean and lamp uniformity. In adition, data is compared to the lamp intensity displayed on the tool's power supply. Data is used to adjust ksaligner's lamp settings; notes for these changes are recorded in process performance section.				Process Performance
7	Description:
8	Tool:	KSALIGNER
9	Meter:	G & R Labs Model 202 Intensity Meter
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11	Process Procedure
12	Step	Description
13	4.20.1 - Tool setup	Check the power supply, set it to i-line constant intensity mode and measure the intensity. Switch to g-line constant intensity mode and measure the intensity.
14	4.20.1 - Tool setup
15	4.20.2 - Lamp Test	Measure and record the lamp intensity with the handheld intensity meter using a 5-point measurement at 5 cm intervals. Record the power supply's in situ reading. Check the lamp power.
16	4.20.2 - Lamp Test
17	4.20.1 - Analysis	Calculate the 5-point mean. Calculate the lamp uniformity using Uniformity = (max reading - min reading)/(max reading + min reading) x 100
18	4.20.1 - Analysis
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20	Output Response
21	Response	Description	Target	USL	LSL
22	i-line (365 nm) Intensity (mW/cm²)	Comparison of the 5-point mean intensity, center point intensity, and power supply intensity readings for i-line.	10	12	8
23	i-line (365 nm) Intensity (mW/cm²)		10	12	8
24	g-line (436 nm) Intensity (mW/cm²)	Comparison of the 5-point mean intensity, center point intensity, and power supply intensity readings for g-line.	10	12	8
25	g-line (436 nm) Intensity (mW/cm²)		10	12	8
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