4.20 Ksaligner Lamp Intensity Monitor (i-line & g-line)
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4.20 - Intensity Measurements on Ksaligner
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Description:This monitor tracks lamp intensity on ksaligner. Measurements include center, top, flat, right, and left intensity readings taken with a handheld intensity meter. These readings are used to calculate a 5-point mean and lamp uniformity. In adition, data is compared to the lamp intensity displayed on the tool's power supply. Data is used to adjust ksaligner's lamp settings; notes for these changes are recorded in process performance section. Process Performance
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Tool:KSALIGNER
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Meter: G & R Labs Model 202 Intensity Meter
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Process Procedure
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StepDescription
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4.20.1 - Tool setup Check the power supply, set it to i-line constant intensity mode and measure the intensity. Switch to g-line constant intensity mode and measure the intensity.
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4.20.2 - Lamp TestMeasure and record the lamp intensity with the handheld intensity meter using a 5-point measurement at 5 cm intervals. Record the power supply's in situ reading. Check the lamp power.
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4.20.1 - AnalysisCalculate the 5-point mean. Calculate the lamp uniformity using Uniformity = (max reading - min reading)/(max reading + min reading) x 100
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Output Response
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ResponseDescriptionTargetUSLLSL
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i-line (365 nm) Intensity (mW/cm²)Comparison of the 5-point mean intensity, center point intensity, and power supply intensity readings for i-line. 10128
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g-line (436 nm) Intensity (mW/cm²)Comparison of the 5-point mean intensity, center point intensity, and power supply intensity readings for g-line. 10128
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