4.20 Ksaligner Lamp Intensity & Power Monitor (i-line & g-line)

	B	C	E	F	G	I
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4	4.20 - Intensity & Power Measurements on Ksaligner
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6	Description:	This monitor tracks lamp intensity and power on ksaligner. Measurements include center, top, flat, right, and left intensity readings taken with a handheld intensity meter. These readings are used to calculate a 5-point mean and lamp uniformity. In adition, data is compared to the lamp intensity displayed on the tool's power supply. The lamp opperates under constant intensity mode; the power supply controls the power to the lamp to maintain constant intensity. Lamp power during an exposure test is recorded and compared for i-line and g-line. Data is used to adjust ksaligner's lamp settings; notes for these changes are recorded in process performance section.				Process Performance
7	Description:
8	Tool:	KSALIGNER
9	Meter:	G & R Labs Model 202 Intensity Meter
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11	Process Procedure
12	Step	Description
13	4.20.1 - Tool setup	Check the power supply, set it to i-line constant intensity mode and measure the intensity. Switch to g-line constant intensity mode and measure the intensity.
14	4.20.1 - Tool setup
15	4.20.2 - Lamp Test	Measure and record the lamp intensity with the handheld intensity meter using a 5-point measurement at 5 cm intervals. Record the power supply's in situ reading. Check the power output for the lamp during the i-line and g-line lamp tests.
16	4.20.2 - Lamp Test
17	4.20.3 - Analysis	Calculate the 5-point mean. Calculate the lamp uniformity using Uniformity = (max reading - min reading)/(max reading + min reading) x 100
18	4.20.3 - Analysis
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20	Output Response
21	Response	Description	Target	Upper Limit	Lower Limit
22	i-line (365 nm) Intensity (mW/cm²)	Comparison of the 5-point mean intensity and power supply intensity readings for i-line.	15	17	13
23	i-line (365 nm) Intensity (mW/cm²)		15	17	13
24	g-line (436 nm) Intensity (mW/cm²)	Comparison of the 5-point mean intensity and power supply intensity readings for g-line.	12	14	10
25	g-line (436 nm) Intensity (mW/cm²)		12	14	10
26	Lamp Power (W)	Power output of the lamp during the i-line and g-line lamp tests.	900	1200	600
27	Lamp Power (W)		900	1200	600
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