Suss AltaSpray - Recipes

	A	B	C	D	E
1	Recipe Parameters	AZ4620 10um	NR71-3000p 7um	NR21-20000 7um	S1827 5um
2	Mixture Ratio (Resist:Acetone:MEK)	1:9:1	1:5:1	1:15:1	1:4:1
3	Chuck Temperature (C)	60	60	60	60
4	Pump Rate (uL/min)	4.0	1.5	1.5	2.8
5	N2 Pressure (bar)	1.5	1.5	1.5	1.5
6	Y Speed (mm/sec)	180	250	250	250
7	Passes	4	4	12	4
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