IBD Ta2O5 Data 2014

	A	B	C	D	E	F	G	H	I	L	P	Q	U	V	W	X
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Avg Index	Dep. Rate	HF e.r.	Stress	LPD (light point defects)		Comment	Mike Silva
2	01/01/14	User	SiO2	1_Ta2O5Dep	(sec)	(A)	Index @632.8nm	Index @1550nm	Index @632.8nm	(nm/min)	(nm/min)	(MPa)	LPD before deposition	LPD after deposition

3				Ta2O5			Index		Avg.Index	Dep.rate		Stress			40 degree fixture angle
4	01/09/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1258.85	2.179	2.124	2.171	8.39	0.16	-239.98	71	477	Less particles
5	01/31/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1395.40	2.171	2.118	2.171	9.30	2.52	-219.56			LPD not done
6	03/19/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1174.49	2.171	2.125	2.171	7.83	0.45	-221.85	57	300	Not many particles
7	04/09/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1281.73	2.176	2.123	2.171	8.54	1.46	-230.81	204	2994	Deposition done in 3 attempts
8	04/29/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1228.73	2.167	2.116	2.171	8.19	1.17	-248.26			Surfscan down
9	05/16/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1242.71	2.168	2.122	2.171	8.28	1.17	-236.43
10	06/09/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1174.44	2.176	2.124	2.171	7.83	1.89	-203.09
11	06/20/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1176.42	2.170	2.122	2.171	7.84	0.77	-255.56	49	578	Mostly particles size #3
12	08/05/14	Bilja	Ta2O5	Bilja_1_Ta2O5_dep	900	1228.46	2.174	2.115	2.171	8.19	0.26	-473.88			Stress weird, not stable
13	09/22/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1108.49	2.173	2.123	2.171	7.39	0.55	-254.94	372	821	Same as the original recipe!
14	10/15/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1151.43	2.168	2.128	2.171	7.68	0.34	-229.64			Same as orinaginal recipe!Very slow HF etch(55min etch /8.375A etched)!
15	11/14/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1089.63	2.166	2.124	2.171	7.26	0.45	-236.10	184	744	BHF etch done 1min!
16	12/03/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1094.88	2.166	2.123	2.171	7.30	0.29	-231.23			BHF etch done 1min!
17	12/15/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1081.78	2.173	2.121	2.171	7.21	0.38	-246.60	170	600
18	12/24/14	Bilja	Ta2O5	Bilja_Ta2O5_dep	900	1102.42	2.172	2.121	2.171	7.35	0.08	-280.40
19					Avg. Thick.	1185.99					0.80
20						Avg. Index	2.171	2.122		7.91	Avg Stress	-253.89
21						Avg+1%	2.193	2.143		8.30	Avg+10%	-279.28
22						Avg-1%	2.149	2.101		7.51	Avg-10%	-228.50
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