IBD SIO2 Thickness uniformity 2014

	B	C	D	E	F	G	H
1
2		Thickness, A		Index @632.8nm			Bilja
3	Date	Min	Max	Max	Min	Thickness Uniformity, %	Comment
4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	01-09-2014	786.01	810.97	1.484	1.478	98.44	Thicker edges
6	01-31-2014	900.81	926.12	1.491	1.492	98.61
7	03-19-2014	817.71	840.58	1.487	1.483	98.62
8	04-09-2014	778.72	804.39	1.485	1.476	98.38
9	04-29-2014	900.21	917.01	1.493	1.492	99.08
10	05-15-2014	880.99	895.79	1.479	1.491	99.17
11	06-09-2014	788.43	805.63	1.489	1.484	98.92
12	06-19-2014	848.72	878.45	1.488	1.481	98.28
13	08-08-2014	1030.20	1058.41	1.492	1.492	98.65
14	09-09-2014	953.47	969.41	1.497	1.493	99.17	New recipe-same as original one/Thicker edges
15	09-22-2014	868.41	885.24	1.492	1.492	99.04
16	10-15-2014	1060.37	1063.69	1.494	1.492	99.84
17	11-14-2014	882.96	905.52	1.492	1.490	98.74
18	12-03-2014	868.56	892.09	1.496	1.496	98.66
19	12-15-2014	910.67	935.93	1.492	1.490	98.63
20	12-19-2014	855.92	880.76	1.489	1.488	98.57
21	12-22-2014	865.35	890.53	1.490	1.489	98.57
22
23	Average	882.21	903.56	1.49	1.49	98.79
24	Avg.+2%	899.85	921.63	1.52	1.52
25	Avg-2%	864.56	885.49	1.46	1.46
26	Max	1,060.37	1,063.69	1.50	1.50	99.84
27	Min	778.72	804.39	1.48	1.48	98.28
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