IBD TIO2 Thickness uniformity 2014

	B	C	D	E	F	G	H
1
2		Thickness, A		Index @632.8nm
3	Date	Min	Max	Min	Max	Thickness Uniformity, %	Comment
4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	01-09-2014	204.98	213.73	2.368	2.370	97.91	Thicker in the center
6	01-31-2014	217.77	223.36	2.300	2.299	98.73	Thicker in the center
7	03-19-2014	196.94	200.06	2.359	2.367	99.21	Thicker in the center
8	04-09-2014	202.32	205.53	2.359	2.364	99.21	Thicker in the center
9	04-29-2014	222.53	224.39	2.320	2.331	99.58	Thicker in the center
10	05-15-2014	194.25	199.29	2.356	2.356	98.72	Thicker in the center
11	06-09-2014	203.68	205.37	2.327	2.331	99.59	Thicker in the center
12	06-20-2014	193.23	189.46	2.336	2.293		Thicker in the center
13	08-05-2014	219.25	226.04	2.370	2.364		Thinner in the center
14	09-22-2014	163.36	168.34	2.063	2.038		Thinner in the center
15	10-15-2014	177.93	179.80	2.017	2.025		Thinner in the center
16	11-14-2014	164.90	171.14	2.023	2.045		Thinner in the center
17	12-03-2014	162.99	167.89	2.156	2.161		Thinner in the center
18	12-15-2014	166.14	167.73	2.058	2.045		Thinner in the center
19	12-24-2014	169.28	171.69	2.198	2.025		Thinner in the center
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21	Average	190.64	194.25	2.24	2.23	98.99
22	Avg.+2%	194.45	198.14	2.29	2.27
23	Avg-2%	186.82	190.37	2.20	2.18
24	Max	222.53	226.04	2.37	2.37	99.59
25	Min	162.99	167.73	2.02	2.02	97.91
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