PECVD1 SiN-1000A Thickness uniformity 2014

	B	C	D	E	F	G	H
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2		Thickness, (Å)		Index @632.8nm			Comment
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4		center of wafer	1cm from edge	center of wafer	1cm from edge		4" Si Wafer
5	Date	Max	Min	Min	Max	Thickness Uniformity %
6	01-06-14	1055.25	1020.11	1.949	1.950	98.31	Film thicker in the center
7	01-23-14	1133.40	1098.46	1.935	1.937	98.43	Film thicker in the center
8	02-03-14	1046.60	1039.25	1.937	1.940	99.65	Film thicker in the center
9	02-18-14	1030.66	1028.13	1.935	1.935	99.88	Film thicker in the center
10	03-14-14	1042.16	1029.08	1.933	1.934	99.37	Film thicker in the center
11	04-08-14	1050.59	1084.04	1.933	1.934		Film thinner in the center
12	04-17-14	1065.49	1106.49	1.931	1.932		Film thinner in the center
13	05-05-14	1072.05	1056.12	1.937	1.938	99.25	Film thicker in the center
14	05-20-14	1057.26	1073.24	1.936	1.938		Film thinner in the center
15	06-04-14	1055.88	1029.37	1.940	1.944	98.73	Film thicker in the center
16	06-16-14	1080.44	1097.29	1.937	1.939		Film thinner in the center
17	08-01-14	1144.40	1123.24	1.945	1.947	99.07	Film thicker in the center
18	08-14-14	1022.34	990.74	1.949	1.949	98.43	Film thicker in the center
19	08-29-14	1054.75	1017.26	1.945	1.946	98.19	Film thicker in the center
20	09-16-14	1076.20	1069.71	1.952	1.952	99.70	Film thicker in the center
21	10-01-14	1058.66	1022.23	1.951	1.950	98.25	Film thicker in the center
22	10-15-14	1046.55	1026.51	1.953	1.954	99.03	Film thicker in the center
23	11-06-14	1037.01	1028.04	1.942	1.949	99.57	Film thicker in the center
24	12-08-14	1016.80	1014.26	1.947	1.953	99.87	Film thicker in the center
25	12-23-14	1053.96	1089.61	1.939	1.937		Film thinner in the center
26	Average:	1060.02	1052.16	1.941	1.943	99.05
27	Avg. +2%	1081.22	1073.20	1.980	1.982
28	Avg. -2%	1038.82	1031.12	1.902	1.904
29	Max	1144.40	1123.24	1.953	1.954	99.88
30	Min	1016.80	990.74	1.931	1.932	98.19
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