IBD SiN Thickness uniformity 2014

	B	C	D	E	F	G	H	I
1
2		Thickness, A		Index @632.8nm
3		Min	Max	Min	Max		Comment	Bilja
4	Date	center of wafer	1cm from edge	center of wafer	1cm from edge	Thickness Uniformity, %
5	9-Jan-2014	617.69	677.13	1.955	1.979	95.41	Non-uniform film
6	31-Jan-2014	585.66	672.70	1.948	1.962	93.08	Non-uniform film
7	19-Mar-2014	662.23	691.96	1.998	2.001	97.80	Non-uniform film
8	9-Apr-2014	640.38	675.21	1.993	1.998	97.35	Non-uniform film
9	29-Apr-2014	625.27	659.67	1.963	1.980	97.32	Non-uniform film
10	15-May-2014	616.28	657.86	1.966	1.986	96.74	Non-uniform film
11	9-Jun-2014	599.87	639.53	1.976	1.981	96.80	Non-uniform film
12	19-Jun-2014	595.95	641.83	1.960	1.969	96.29	Non-uniform film
13	29-Aug-2014	521.30	608.05	1.941	1.953	92.32	IBD problems!	New recipe!
14	September	Discontinued taking SIN data!
15
16	Average	607.18	658.22	1.967	1.979	95.90
17	Avg.+2%	619.32	671.38	2.006	2.018
18	Avg-2%	595.04	645.05	1.927	1.939
19	Max	662.23	691.96	1.998	2.001	97.80
20	Min	521.30	608.05	1.941	1.953	92.32
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58