IBD Ta2O5 Thickness uniformity 2014

	B	C	D	E	F	G	H
1
2		Thickness, A		Index @632.8nm			Bilja
3	Date	Max	Min	Max	Min	Thickness Uniformity, %	comment
4		center of wafer	1cm from edge	center of wafer	1cm from edge
5	01-09-2014	1258.85	1251.79	2.179	2.179	99.72
6	01-31-2014	1401.73	1387.38	2.170	2.172	99.49
7	03-19-2014	1174.49	1170.03	2.171	2.169	99.81
8	04-09-2014	1281.73	1275.22	2.176	2.172	99.75
9	04-29-2014	1228.73	1220.93	2.167	2.165	99.68
10	05-16-2014	1242.71	1240.60	2.168	2.168	99.92
11	06-09-2014	1174.44	1160.13	2.176	2.181	99.39
12	06-20-2014	1176.42	1171.59	2.170	2.166	99.79
13	08-05-2014	1228.46	1227.54	2.174	2.174	99.96
14	09-22-2014	1108.49	1103.45	2.173	2.172	99.77	new recipe/same as original one
15	10-15-2014	1151.43	1145.14	2.168	2.170	99.73
16	11-14-2014	1089.63	1085.55	2.166	2.165	99.81
17	12-03-2014	1094.88	1092.09	2.166	2.171	99.87
18	12-15-2014	1081.78	1081.65	2.173	2.176	99.99
19	12-24-2014	1102.42	1101.15	2.172	2.173	99.94
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22	Average	1,186.41	1,180.95	2.17	2.17	99.77
23	Avg.+2%	1,210.14	1,204.57	2.21	2.22
24	Avg-2%	1,162.68	1,157.33	2.13	2.13
25	Max	1,401.73	1,387.38	2.18	2.18	99.99
26	Min	1,081.78	1,081.65	2.17	2.17	99.39
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