ABCDEFGHIJKLMNOPQ
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Thickness, AIndex @632.8nmThickn. Uniformity, %
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MinMaxMinMaxComment/Mike SIlva
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Datecenter of wafer1cm from edgecenter of wafer1cm from edge
Thickness Uniformity, %
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01-17-142845.672855.291.4721.473Thinner in the center
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01-30-142762.422792.911.4741.474Thinner in the center
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02-03-142772.812795.841.4731.473Thinner in the center
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02-18-142772.602775.381.4731.473Thinner in the center
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03-12-142776.832778.501.4731.473Thinner in the center
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04-03-142855.112863.151.4701.473Thinner in the center
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04-25-142777.352778.071.4731.473Thinner in the center
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05-12-142960.152934.341.4751.47499.56Thicker in the center
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05-20-142993.192970.951.4791.47599.63Thicker in the center
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06-04-142936.832950.731.4771.477Thinner in the center
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06-17-142890.482907.751.4751.473Thinner in the center
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07-29-142841.862824.801.4741.47499.70Thicker in the center
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08-14-142849.472863.961.4741.474Thinner in the center
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08-27-142825.412843.521.4741.475Thinner in the center
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09-15-142834.022846.591.4771.478Thinner in the center
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09-29-142781.492799.031.4751.475Thinner in the center
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10-06-142958.682940.871.4771.47899.70Thicker in the center
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10-14-142906.432903.641.4761.47699.95Thicker in the center
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11-05-142976.112972.011.4751.47599.93Thicker in the center
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11-26-142947.692931.441.4761.47699.72Thicker in the center
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12-09-142957.082962.301.4761.476Thinner in the center
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12-23-142939.952931.221.4741.47699.85Thicker in the center
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Average:2870.982873.741.4751.47599.76Silane gets lower- film thinner in center
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Avg.+2%2928.402931.221.5041.504
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Avg.-2%2813.562816.271.4451.445
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Max2993.192972.011.4791.47899.95
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Min2762.422775.381.4701.47399.56
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