IBD SiN Data 2014

	A	B	C	D	E	F	G	H	I	J	K	L	M	N	O	P	Q	R	S	T	U	V	W	X	Y
1	Date	User	Film	Recipe	Dep.time	Thickness	JAW EC-400 (Woolam S. E.)		Avg Index	Index+1%	Index -1%	Dep. Rate	Avg.dep.rate	Avg+10%	Avg-10%	HF e.r.	Stress	Avg. Stress	Avg+10%	Avg-10%	LPD (light point defects)		Comment	Mike Silva	Bilja
2	01/01/14	User	SiN	1_SiNDep	(sec)	(A)	Index @632.8nm	Index @1550nm	Index @632.8nm			(nm/min)	(nm/min)	(nm/min)	(nm/min)	(nm/min)	(MPa)	(MPa)	(MPa)	(MPa)	LPD before deposition	LPD after deposition

3				SiN			Index		Avg.Index	Index+1%	Index-1%	Dep.rate	Avg.dep.rate	Avg+10%	Avg-10%		Stress	Avg.Stress	Avg+10%	Avg-10%
4	01/09/14	Bilja	SiN	Bilja_1_SiN_dep	900	617.69	1.962	1.955	1.969	2.029	1.910	4.12	4.10	4.51	3.69	14.53	-1721.22	-1589.96	-1748.95	-1430.96	80	15039	Failed, 1st run
5	01/09/14	Bilja	SiN	Bilja_1_SiN_dep	900	592.91	1.962	1.969	1.969	2.029	1.910	3.95	4.10	4.51	3.69			-1589.96	-1748.95	-1430.96	68	4755	Particles in the center of wafer, 2nd run
6	01/31/14	Bilja	SiN	Bilja_1_SiN_dep	900	585.66	1.948	1.945	1.969	2.029	1.910	3.90	4.10	4.51	3.69	26.48	-1552.92	-1589.96	-1748.95	-1430.96
7	03/19/14	Bilja	SiN	Bilja_1_SiN_dep	900	662.23	1.996	1.979	1.969	2.029	1.910	4.41	4.10	4.51	3.69	6.03	-1570.39	-1589.96	-1748.95	-1430.96	89	662
8	04/09/14	Bilja	SiN	Bilja_1_SiN_dep	900	640.38	1.993	1.979	1.969	2.029	1.910	4.27	4.10	4.51	3.69	4.92	-1488.40	-1589.96	-1748.95	-1430.96	133	1602
9	04/29/14	Bilja	SiN	Bilja_1_SiN_dep	900	625.27	1.963	1.935	1.969	2.029	1.910	4.17	4.10	4.51	3.69	8.86	-1560.90	-1589.96	-1748.95	-1430.96			Surfscan down, SIN film not uniform
10	05/15/14	Bilja	SiN	Bilja_1_SiN_dep	900	616.28	1.966	1.922	1.969	2.029	1.910	4.11	4.10	4.51	3.69	6.82	-1816.60	-1589.96	-1748.95	-1430.96			SiN film Ok
11	06/04/14	Bilja	SiN	Bilja_1_SiN_dep	900	599.87	1.976	1.977	1.969	2.029	1.910	4.00	4.10	4.51	3.69	4.92	-1362.54	-1589.96	-1748.95	-1430.96			SiN film Ok
12	06/19/14	Bilja	SiN	Bilja_1_SiN_dep	900	595.95	1.960	1.916	1.969	2.029	1.910	3.97	4.10	4.51	3.69	15.14	-1646.68	-1589.96	-1748.95	-1430.96	164	1020	Film non-uniform, lighter color in the center
13	08/29/14	Bilja	SiN	Bilja_1_SiN_dep																			Problems in August with IBD deposition!	Mike would change grids!	My recipe would not run, but Mike's recipe (different then mine) would run !
14	09/22/14	Bilja	SiN	Bilja_SiN_dep																			Discontinued taking data for SIN!!!	Reason: Deposition is NOT Stable, Not used OFTEN!	Created new recipe( same as original one)
15					Avg. Thickness	615.14									Avg HF e.r.	10.96
16						Avg. Index	1.969	1.953			Avg. Dep.Rate	4.10				Avg Stress	-1589.96
17						Avg+3%	2.029	2.011			Avg+10%	4.51				Avg+10%	-1748.95
18						Avg-3%	1.910	1.894			Avg-10%	3.69				Avg-10%	-1430.96
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