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Equipment of Mixing - Distribution

Equipment of Mixing-Distribution of slurry for the semi-conductor industry

Large base installée sur lignes de production

Benefits

  • Mixing volume and ratio programmable
  • Mixing repeatability : 1 wt, %
  • Permanent recirculation loop
  • Distribution continues
  • Constant flow and pressure delivery
  • Space-optimized
  • Automatic rising and emptying
  • Mass or volume measurement

Interface

  • Touch control screen
  • Several modes : Process, Maintenance, Settings

Structure

  • Compatible with various slurries type
  • Compatible with many drums
  • Use of Furon – Asti equipment

Market served

  • Semiconductor
  • Medical
  • Optic
  • Solar/PV
  • LED’s

Key Features

  • Highly configurable, with adjustable batch or tank sizes and recipes
  • Batch configurations equipped with automatic flush / purge of tanks and lines between operations

EDS : L’évolution contrôlée

04.76.51.94.72 - contact@edsolution.fr

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Equipement de Mélange / Distribution

Système de Mélange / Distribution de slurry pour l’industrie des semi-conducteurs

Large base installée sur lignes de production

Pump

Drums

  • 1/2’’
  • 10 L/min
  • 3/4’’
  • 20 L/min
  • 20 L
  • 50 L
  • 50 L
  • 100 L
  • 1’’
  • 50 L/min
  • 100 L
  • 200 L

Pumps

- Séveral possible configurations :

- Asti Saint-Gobain :

Options

  • Inline metrology
  • Sampling
  • Fab network connection
  • FM4910

Safety features

  • Segregated electrical and chemical compartments
  • Cabinet leak détection and door interlocks
  • Empty drum detector
  • Local and remote EMO
  • Retention tank
  • Audible and visual warnings and alarms
  • Extraction
  • Complies with all majors standards

EDS : L’évolution contrôlée

04.76.51.94.72 - contact@edsolution.fr