DISCO Wafer Saw Training

Blade Change

Overview

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1. Initialize system
1. Figure A – initialization and go to 3^rd step Blade Set up
2. Do blade set up
3. Go to blade replacement screen
4. Save data for existing blade in the used blade list – Use the same name as in the blade ID field. The name should match the one written on the blade container.
5. Select data for the blade to be installed – if it is a used blade it should be in the “Used Blade” list – otherwise select it from “User Blade” list (for new blades)
6. If the blade is new, change the lot ID under blade information to reflect blade type and date of install and write down the ID on the blade case as well.
7. Make sure the blade information is correct
• Hub vs. Flange mount
• Exposure number if the blade is hub blade
• Blade OD if it is a resin blade.
• Correct it if needed.

Two blade sets: note the equipment

Note: common screw

Resin blade

Hub blade

Initialize the system

Two blades: Resin & Hub

Final hub set assembly

Final flange set assembly

Do

Don’t

Resin blade can break very easily. Make sure to properly place the blade on the spindle! See next slide for details.

Select blade set up, press start

Go to blade replacement screen

Save data for existing blade in the used blade list – Use the same name as in the blade ID field. The name should match the one written on the blade container.

Make sure spindle lock is on

Select data for the blade to be installed. If it is a used blade it should be in the “Used Blade” list. If it is a new blade–select it from “User Blade” list (for new blades).

Used Blade List

User Blade List

For new blades

If it is a new blade, select it from “User Blade” list. Change the lot ID under blade information to reflect blade type and date of install and write down the ID on the blade case as well.

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User Blade List

For new blades

Highlight correct blade and press Select

Make sure the blade information is correct:

• Hub vs. Flange mount
• Exposure number if the blade is hub blade
• Blade OD if it is a resin blade
• Correct it if needed

Then go to the housing and replace the blade

Move water housing out of the way.

Remove the locknut using the locknut tool and the screwdriver.

Remove the locknut from the locknut tool. Then remove the top flange if it is a flange/resin setup.

Remove blade.

Hub mount removal shown

Remove the common screw that secures the mount to the spindle. Note there will be a washer with the screw if it is flange/resin setup and just the screw if it is a hub mount.

Hub mount removal shown

Use the appropriate tool to remove the flange or hub mount from the spindle.

Hub mount removal shown

Install the hub / flange mount on the spindle. If it is the hub mount, only needs the common screw. If it is the flange mount, it needs both washer and common screw.

Flange mount installation shown

Secure the screw with two clicks of the screw driver.

Flange mount installation shown

Confirm blade ID

Insert the blade; make sure that the blade is sitting properly on the groove.

Secure blade with top flange (only for resin blade)

Make sure the top flange is all the way in and the blade is sitting evenly between the two flanges.

Flange mount installation shown

Screw in the locknut using the locknut tool. Note that the locknut tool teeth will grab the wider side of the locknut.

Flange mount installation shown

Tighten it with the screwdriver so it clicks twice.

Flange mount installation shown

Remove the locknut tool.

Move water housing back in place.

Press Enter – This loads the blade data and if it is a used blade removes the data from the used blade list.

Now the blade information will reside under current blade information and will be updated every time the blade set up is done. Press next and start blade set up.

Final Steps

• Prepare wafer for a test cut and load the appropriate Device Data file.
• Do a test cut. The machine will prompt you to do the hairline alignment.
• After the first cut, center the cursor in the cut and press the hairline adjust button.
• If the offset is over 50 um, the machine will ask you to confirm the Hairline alignment by pressing the “Hairline Align” button again.
• Note that the offset will be more than 50 um when changing from hub to resin or resin to hub.
• Stop operation, initialize tool and remove test wafer. Blade change process is now complete.