SEZ SP 4300

SN-887

SP 4300

• Tool Model : SEZ 4300
• Serial Number : 00887
• Year 2005
• 400v
• 75A
• 50/60HZ

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Technical Data:

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Wafer size: 300 mm (12 inch)

Dimension WxDxH: 2800x4150x2450 mm

Handling Device: Dual Arm Robot on Linear

Tracking System

Process Chambers: Four Multi-Level Process Chambers

double sided wafer treatment

Chemical Cabinet: Integrated in Main Unit

Software: Windows NT

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CDS