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Equipment for chemical Mixing / Distribution

Equipment for chemical mixing / distribution

for the semiconductor industry

Benefits

  • Mixing volume and ratio programmable
  • Mixing repeatability : 1% wt,
  • Distribution continues
  • Constant flow and pressure
  • Space-optimized
  • Automatic rising and emptying
  • Mass or volume measurement

Interface

  • Touch control screen
  • Several modes : Process, Maintenance, Settings

Chemistries

  • SC1, SC2, DHF, SPM, SOM, BHF, HF/HNO3, TMAH, HF/HCL, NH3, H2SO4/HF, KOH

Structure

  • Resists acid, base, solvent, slurry
  • Compatible with many drums
  • Use of Furon – Asti equipment

Key Features

  • Highly configurable, with adjustable batch or tank sizes and recipes
  • Batch configurations equipped with automatic flush / purge of tanks and lines between operations

EDS : L’évolution contrôlée

04.76.51.94.72 - contact@edsolution.fr

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Pump

  • 1/2’’
  • 10 L/min
  • 3/4’’
  • 20 L/min
  • 1’’
  • 50 L/min

Pumps

  • Asti Saint-Gobain
  • Séveral possible configurations :

Options

  • Inline métrologie
  • Sampling
  • Fab network connection
  • FM4910

Safety features

  • Segregated electrical and chemical compartments
  • Cabinet leak détection and door interlocks
  • Empty drum detector
  • Local and remote EMO
  • Rétention tank
  • Audible and visual warnings and c alarms
  • Extraction
  • Complies with all majors standards

Equipment for chemical Mixing / Distribution

Equipment for chemical mixing / distribution

for the semiconductor industry

Drums

  • 20 L
  • 50 L
  • 50 L
  • 100 L
  • 100 L
  • 200 L

Drums

  • Séveral possible configurations :

EDS : L’évolution contrôlée

04.76.51.94.72 - contact@edsolution.fr