Getting Started in L-Edit
After this presentation you will..
Setup
Start a Design File, Set-Up Layers, Application Defaults, and the Grid
Start a Design
Setup Layers
Access the menu by either right-clicking in the Layer Palette Window, or go Setup > Layers…
Make Some Layers
Give the layers names that mean something in your design
These layers are built-in L-Edit layers. Do not modify.
If you plan on exporting to GDS, give your layer a unique GDSII number.
The derivation tab is only used in designs made with automated layer creation.
You can leave Data Type blank and L-Edit will export with a warning. A Data Type of 0 (zero) also works.
Safe to Ignore
Make Some Layers, Continued
Set fill and outline for both the object and selected object to contrast selected objects when editing your design.
Objects
Selected Objects
Stacked Objects
Mode effects color for stacked objects
Update Both
Ignore
Setup Application and Setup Design
Change application settings, and determine what types of curve tools are available. To draw circles, make sure All Angles & Curves is selected.
Pay attention to your Grid Settings. Your manufacturing grid will determine where vertices are placed when exporting; don’t choose a nanometer grid for a tool with micron addressability.
Recommendation: Don’t change settings on other tabs. Changes to Setup Application persist after opening and closing L-Edit. Setup Design settings are design-dependent and revert to default with a new design file.
Recommended Manufacturing Grids
Reticle/Mask made at Nanolab?
yes
no
Use Manufacturing Grid of 0.1 μm or larger
Is this design for e-beam lithography? (Crestec Tools)
yes
no
What is your field size/dots? This will determine your manufacturing grid. If this is unknown, use 0.001 μm.
You appear to be using an outside vendor. Inquire with them for their manufacturing grid.
Cells and Instances
Cell Definition, Instance Definition and Modification
Q: This is all a lot of work… why bother?
A: Cells. Cells are like functions for layouts.
[N] – Create a Cell
Draw!
Regular Polygons
Wires
Circles and Torii
Use a 3-Button Mouse with the Keyboard
[CTRL]
[SHIFT]
[ALT]
[Left-Click]
[Middle-Click]
[Right-Click]
Mouse buttons work differently depending on the tool selected and the depressed keyboard keys.
[No Key]
[I] – Instance a Cell
[Ctrl + E] – Edit an Instance
Cell to Instance
Name of this particular instance
Instance Location
Scaling Ratio
Array Parameters
Instance Rotation
Array Parameters:
Repeat Count – Integer number of cells in X/Y directions. X/Y references the rotation diagram.
Delta – Distance between arrayed cells. Default is Cell Width/Height but can be any value (including overlapping)
[O] – Edit a Cell
Editing Example: Changing Circle Sizes
Element in the Cell “Circle”
3 Instances of the Circle Cell
Resize the Circle
View (at same scale) of the circle instances
[Ctrl + U], [Ctrl + G] – More Editing Options
[Ctrl + U]
Ungroup objects if you no longer want to link them to the original cell
[Ctrl + G]
Group objects or instances to a new cell
Drawing Tips and Tricks
Origin, Boolean Commands, Editing, Etc.
The Origin Matters
[Ctrl + E] – Editing Objects
[B] – Boolean Operations
[Ctrl + D] and [M] – Duplicate and Move
Useful Hotkeys
Object Snapping
This is the Object Snap Menu. To activate it, press the magnet button (second to right). If the menu isn’t visible, check the box in View → Toolbars → Object Snap. This allows snapping to vertices, midpoints, along lines, or to the center of objects.
�Snapping is particularly useful when measuring objects. To measure an object, snap the cursor to the vertex of interest, then hit [T] to get a temporary ruler. Hover the cursor over the distance you want to measure. If you want the ruler to persist -- click. If you don’t want a persistent measurement, hit [ESC]. If you have a ruler that you want to remove, click the eraser button in the Node Highlighting Toolbar, or Tools → Node Highlighting → Clear Markers.
[T] – Temporary Ruler
Click to set reference point
Hover over the vertex for measurement
Measurement
Hit [Esc] to clear the measurement
Or
Click to preserve the measurement
Useful Examples: “Break” an Array
“Array-out” the instances that you need. It’s useful to have more than you need as it tends to be faster to delete than add back in.
Ungroup the array. Here, I’ve shown the appearance when all the individual instances are selected. Compare to the appearance when an array of instances is selected.
Delete the instances you don’t want. The remaining instances still refer to the original cell, so updates to the original cell will still propagate throughout the design.