AJA-evaporator

The AJA e-beam evaporator can be used to directionally deposit various metals.

AJA-evaporator

The AJA e-beam evaporator can be used to directionally deposit various metals.

Picture and Location

Process Capabilities

Cleanliness Standard

Performance of the Tool

Contact List

Training to Become a Tool User

Operating Procedures

Picture and Location

 

The tool is located in 155A.

AJA-2

Background

 

Process Capabilities

Cleanliness Standard

 Gold-contaminated

Performance of the Tool

What the Tool CAN do

Contact List

The following people make up the Tool Quality Circle:

 

Training to Become a Tool User

Contact Xiaoqing Xu, steelxu@stanford.edu  for training. You will be required to shadow users on the tool twice and pass a written test before scheduling training.

 

Operating Procedures

Before you begin:

  1. Start a log book entry and write down the main chamber base pressure. If it is higher than 5e-7, but less than 5e-6, wait for 30 minutes and note the pressure again. If it has not improved to the e-7 range, STOP and report a Problem on Badger.
  2. Check the Sensor Info on the Inficon controller and make sure that Sensor 1 does not show a failure, error, or 0%. If it is below 75%, you may continue your run but should report it as a Problem on Badger.

To operate the tool:

  1. Load sample into load lock
  1. Make sure that the load lock gate valve is closed - the upper indicator on the side of the gate valve should be lit red and the lower indicator should not be lit.
  2. Vent the load lock by switching off (down) the “Vacuum Pumps” switch on the AJA International Power Distribution control panel. The vacuum gauge will read ~7.6 e2 when the load lock is vented. This should take 2-3 minutes.
  1. DO NOT touch the “Mains Power” switch!!!
  1. Mount your sample(s) on one of the supplied chucks. The chuck screws take a 1/16” allen wrench.
  2. Open the lid to the load lock and place the chuck face down in the circular cutout of the load lock arm.
  3. Pump down the load lock by holding the lid shut while switching on (up) the “Vacuum Pumps” switch on the AJA International Power Distribution control panel.
  1. DO NOT touch the “Mains Power” switch!!!
  1. Wait until load lock vacuum pressure is below 7e-6. If you do not have strongly outgassing materials on your sample, this should take 3-5 minutes.
  1. Transfer sample from load lock into main process chamber
  1. Open the window shutter on the left side of the main chamber and turn on the lamp there. Open the window shutter on the front of the chamber and align the polarizer with the knobs up and down so that you can see into the chamber.
  2. Open the load lock valve by pressing the red “OFF” button labeled “LLIV” on the touchscreen controller main screen. If you are not at the main screen, press the grey “RTN” button at the top right corner to return to the main screen.
  1. You should hear the gate valve open, and the indicators on the side will switch such that the lower indicator is lit red and the upper indicator is not lit.
  1. Ensure that the chuck holder in the main chamber is in the correct position to receive the chuck.
  1. The height indicator should be set to 90; adjust it if necessary.
  2. The rotation indicator should be set such that the double arrow and its circular outline are visible in the window; adjust it if necessary.
  1. Move the load lock arm into the main chamber by rotating the small crank to the right of the load lock chamber counter-clockwise until the shuttle on top of the rail is flush with the block on the rail.
  1. Do not run the shuttle into the block at high speed!
  2. Look into the chamber to confirm that the top knob of the chuck holder is in the chuck holder.
  1. Transfer the chuck from the load lock arm to the chuck holder by changing the height of the chuck holder from 90 to 70.
  1. Look into the chamber while you are doing this to ensure that the chuck holder is picking up the chuck as intended, and to double-check that the load lock arm will clear the chuck as it retracts.
  1. Retract the load lock arm from the main chamber by rotating the small crank to the right of the load lock chamber clockwise until it reaches the end of its travel.
  1. Look into the load lock to confirm that the arm is in its fully retracted position.
  1. Close the load lock valve by pressing the green “ON” button labeled “LLIV” on the touchscreen controller main screen.
  1. You should hear the gate valve close, and the indicators on the side will switch such that the upper indicator is lit red and the lower indicator is not lit.
  1. Home the crucible index drive. This helps avoid issues with it getting stuck or confused about the current material it is at during your deposition.
  1. On the touchscreen panel, press the green “Crucible Index Enabled” button. On the touchscreen crucible index screen, click the red “REMOTE” button to switch it to the green “LOCAL” state, then press “HOME.” The crucible should rotate to Pocket 1, which is normally Ti. Then press “LOCAL” to change it back to “REMOTE.”
  1. Select correct material on “Gameboy” Controller
  1. If not in the Menu, push the yellow “Menu/Quit” button on the left.
  2. In the menu, use the left joystick to move up or down to “Set pocket.”
  3. Use the right joystick to move the arrows up or down to the appropriate material. Select it by clicking the joystick right.
  4. Confirm that the correct material is now displaying in the top bar of the “gameboy” display, or on the main screen after pressing the “Menu/Quit” yellow button again.
  1. Select correct recipe on Deposition Controller
  1. Note that the Deposition Controller is NOT a touchscreen. Use the buttons to the left of the screen to select options and the wheel to the right to navigate and to increase or decrease values.
  2. Press the “Next Menu” button until the option below it reads “Process Menu.” Select “Process Menu.”
  3. Use the wheel to scroll to your desired recipe, then press “Select,” then “Edit.”
  4. Press “Edit” again. (Note that it’s now moved down by a button.)
  5. Scroll to “Final Thickness,” press “Edit,” and change the value to your desired thickness using the wheel. Then press “Enter” followed by “To Main.”
  1. DO NOT ALTER RECIPES’ DEPOSITION RATES. Use the recipe for the material you want that is set for your desired rate. If you would like to deposit at a rate for which there is no recipe for your material, talk to the staff in charge of the tool.
  1. Make sure the chamber pressure is below 5e-7. If the pressure is below 5e-6, the filament will be fine but films will be contaminated from high backgrounds of water and oxygen. Above 5e-6, filament damage may occur and films will be significantly contaminated.
  2. Turn on e-beam high voltage power supply
  1. Flip on the green switch labeled “MAIN” at the bottom of the right stack of controlling equipment on the tool.
  2. Press the green “ON” button under ‘HV” on the gameboy controller.
  1. Turn on sample rotation if desired
  1. Flip on the top switch in the top controller box in the lower middle panel of controllers for the tool.
  2. Use the knob next to it to adjust the revolution rate.
  1. Run Recipe
  1. Press the green “Start” button on the Deposition Controller
  2. IF THE RAMP RATE is much higher than expected, STOP the process. The Inficon controller should be turned off with the switch on the back of it, waiting 20 seconds, and then turned back on. This will usually correct this condition. Start the process again and make sure this is fixed.
  3. PAY ATTENTION TO YOUR SOURCE AND THE DEPOSITION CONDITIONS DURING YOUR DEPOSITION.
  1. The recipe will contain a Ramp 1, Soak 1, Ramp 2, Soak 2, Shutter Delay, and Deposition step. The shutter will automatically open after the rate stabilizes, and close again when your set final thickness is reached. After the shutter closes, the power will ramp down slowly to zero. Do not stop the recipe before it has finished ramping down the power - this can damage the sources.
  2. As your process is running, and especially at the beginning, you should use the viewport on the front of the tool to monitor the state of your source. Learn to recognize the sources you use and how they look when being evaporated. There are a few things that can go wrong:
  1. You could have the wrong material selected on the gameboy. Check that this is correct if things are looking weird.
  2. The tool may not have rotated to the correct pocket. On the touchscreen controller, press the green “Crucible Index Enabled” button to see what crucible the tool thinks it is at. HOWEVER, you should also be aware that sometimes the tool gets confused about what crucible it is actually located at, and lies to you. If you suspect that this has happened, stop your recipe (for your sample’s sake, before the shutter opens and deposition begins). On the touchscreen crucible index screen, click the red “REMOTE” button to switch it to the green “LOCAL” state, then press “HOME.” The crucible should rotate to pocket 1, which is normally Ti. Then press “LOCAL” to change it back to “REMOTE.” If this does not solve the problem, contact the staff responsible for the tool and shut it down.
  3. There could be an issue with your source. Stop the recipe if you have any sort of runaway deposition rate or power, or if there appears to be a hole drilled through your source. Contact the staff responsible for the tool and shut it down.
  1. If desired: add a layer of another material
  1. Set a timer for 10 minutes when your deposition step ends. You MAY NOT start another layer in this time. Rotating the crucible while a source is hot can destroy the tool.
  2. Return to step 4.
  3.  
  1. Turn off sample rotation if used
  1. Flip off the top switch in the top controller box in the lower middle panel of controllers for the tool.
  1. Log your usage!
  1. You will be fined if you fail to log your usage correctly.
  2. Log your username, the date, the base pressure of the main chamber, the materials and thicknesses of each of your layers, and the lifetime state of the crystal monitor.
  1. To check the lifetime state of the crystal monitor: press the button for "Next Menu" on the deposition controller until "Sensor Info" appears as an option. Select this option, then log the percentage of lifetime left for Sensor 1. If it is below 75%, report it as a Problem on Badger.
  1. Turn off e-beam high voltage power supply
  1. Press the red "OFF" button under "HV" on the gameboy controller.
  2. Flip off the green switch labeled "MAIN" at the bottom of the right stack of controlling equipment on the tool.
  1. Transfer sample from main process chamber into load lock
  1. Open the window shutter on the left side of the main chamber and turn on the lamp there. Open the window shutter on the front of the chamber and align the polarizer with the knobs up and down so that you can see into the chamber.
  2. Open the load lock valve by pressing the red “OFF” button labeled “LLIV” on the touchscreen controller main screen. If you are not at the main screen, press the grey “RTN” button at the top right corner to return to the main screen.
  1. You should hear the gate valve open, and the indicators on the side will switch such that the lower indicator is lit red and the upper indicator is not lit.
  1. Ensure that the chuck holder in the main chamber is in the correct position to receive the chuck.
  1. The height indicator should still be set to 70 from your evaporation; adjust it if necessary.
  2. The rotation indicator must be set such that the double arrow and its circular outline are visible in the window; adjust it if necessary. This will be needed if you have used sample rotation.
  1. Move the load lock arm into the main chamber by rotating the small crank to the right of the load lock chamber counter-clockwise until the shuttle on top of the rail is flush with the block on the rail.
  1. Do not run the shuttle into the block at high speed!
  2. Look into the chamber to confirm that the top knob of the chuck holder is in the chuck holder.
  1. Transfer the chuck from the chuck holder to the load lock arm by changing the height of the chuck holder from 70 to 90. DO NOT GO PAST 90.  
  1. Look into the chamber while you are doing this to ensure that the chuck holder is putting down the chuck as intended, and to double-check that the load lock arm will hold the chuck as it retracts.
  1. Retract the load lock arm from the main chamber by rotating the small crank to the right of the load lock chamber clockwise until it reaches the end of its travel.
  1. Look into the load lock to confirm that the arm is in its fully retracted position.
  1. Close the load lock valve by pressing the green “ON” button labeled “LLIV” on the touchscreen controller main screen.
  1. You should hear the gate valve close, and the indicators on the side will switch such that the upper indicator is lit red and the lower indicator is not lit.
  1. Unload sample from load lock
  1. Make sure that the load lock gate valve is closed - the upper indicator on the side of the gate valve should be lit red, and the lower indicator should not be lit.
  2. Vent the load lock by switching off (down) the “Vacuum Pumps” switch on the AJA International Power Distribution control panel. The vacuum gauge will read ~7.6 e2 when the load lock is vented. This should take 2-3 minutes.
  1. DO NOT touch the “Mains Power” switch!!!
  1. Open the lid to the load lock and pick up the chuck from the circular cutout of the load lock arm.
  2. Pump down the load lock by holding the lid shut while switching on (up) the “Vacuum Pumps” switch on the AJA International Power Distribution control panel.
  1. DO NOT touch the “Mains Power” switch!!!
  1. Unmount your sample(s) from the chuck. The chuck screws take a 1/16” allen wrench.
  2. Put the chuck away face down, with several cleanroom wipes between it and the other chuck.