Date: 05 February 5, 2024
Item | York | Academic | Industrial | Mini$/Activation |
Microfabrication Cleanroom (PSE423/424) | ||||
Cleanroom Levy+ | $15/hr | $25/hr | $30/hr | 1hr |
Stylus Profilometer | $30/hr | $45/hr | $60/hr | 0.5hr |
Optical Microscope | free | free | free | n/a |
Hot Plate+ | $10/hr | $15/hr | $20/hr | 0.5hr |
Spin Coaters | $20/hr | $30/hr | $40/hr | 0.5hr |
Plasma Etcher | $30/hr | $45/hr | $60/hr | 0.5hr |
UV Mask Aligner | $50/hr | $75/hr | $100/hr | 1hr |
Wet Bench | free | free | free | n/a |
Advanced Manufacturing Lab (BRG037) | ||||
Sputtering System | $60/hr | $85/hr | $120/hr | 1.5hr |
Ebeam Evaporator++ | $60/hr | $85/hr | $120/hr | 1.5hr |
PECVD | $60/hr | $85/hr | $120/hr | 1.5hr |
RIE | $60/hr | $85/hr | $120/hr | 1.5hr |
Other Locations | ||||
Keyence Digital Microscope (BRG324) | $30/hr | $45/hr | $60/hr | 0.5hr |
Services | ||||
Film Mask | Fill out the request form for pricing information | n/a | ||
Mask Editing | $50/hr | $75/hr | $100/hr | 0.5hr |
Introductory Training (lab tour) | Free | Free | Free | n/a |
Specific Tool Training | $50/hr/pp | $75/hr/pp | $75/hr/pp | 1hr |
Note
+Fees are currently waived for denoted instruments.
++The rate does not include certain materials. The price of materials can be found at the section of Price of PVD Materials.
Prices do not include sales tax (if applicable).