Filmetrics F40 Operation Instructions

Special Notes or Restrictions:

• NO RESERVATIONS
• NOTE: BOLD ALL CAPS DESCRIBES A BUTTON IN THE SOFTWARE.

Startup

• Enable "Filmetrics" on Badger
• If necessary log into computer with Bitlocker PIN:

Bitlocker: 5T4VJ0212345

• Log in with the following username and password. Advanced training required for Engineering access.

• Windows Login

                username: labmembers

                password: labmembers

• Run FILMeasure software

• if software is already open, close previous window and reopen userID: opSNF or engSNF(needed to edit recipes)
• passwd: opSNF

• Make sure microscope filters and polarizers are out, adjust aperture

• microscope filters - on the right, make sure all 4 pins are pushed all the way out
• polarizers - on the left, make sure black slide is pulled out
• setaperture lever to bottom positionset center wheel to – BF

• Select Live Video on the left side of the program

• the black dot is what is being measured
• adjust focus until aperture is clearly- course focus

• Set lamp to intensity required by magnification

• select microscope objective that will be used for measurement. focus on surface to be measured(50X and 100X, focus is critical for background&measurement)
• Select Setup -> Raw Signal to display intensity on the graph
• Verify Integration time= 40 msec, #cycles = 1
• adjust lamp intensity knob so graph peaks are ~2500 counts. For 100X set lamp intensity as high as possible and pull viewport slider out
• click close

• Choose microscope objective from dropdown list
• Run Baseline

Step 1: Take Sample Reflectance

• Place film:wafer to be measured (For calibration- Filmetrics calibration wafer or SiO wafer from Nanospec 2 on the stage
• take Sample Reflectance -> Autoscale Gain -> OK

Step 2: Take Reflectance Standard

• choose underlying substrate material from the dropdown list
• focus on material used for the reflective standard wafer
• take Reflective Standard -> Autoscale Gain -> OK -> Next

Step 3: Take Background

• move stage so the hole in the stage is under the objective
• take background -> finish

If the objective is changed, a new baseline must be run. Below are the measurement capabilities of the available objectives:

Taking a Measurement

• Select recipe from the dropdown list of available films in SNF labmember folder
• Place wafer under objective and focus

• If the objective is changed, a new baseline must be run!

• Click Measure (inactive until baseline is run)

                blue line = measured values

                red line = calculated values

Saving Data

• Go to the History tab above the graph -> display previous measurement -> save as

• bring your own USB!

Shutdown

• Remove wafer

• Rotate objective to 5x
• Close FILMeasure program
• Disable"Filmetrics" on Badger

Troubleshooting

• If computer screen is frozen -> restart computer under the desk

• warning: intensity changed -> press OK