SVG Develop Tracks, svgdev/svgdev2
The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses developer and rinses with DI water; and an oven station for post-bake.
SVG Develop Tracks, svgdev/svgdev2
Special Notes or Restrictions:
Contact List and How to Become a User
Basic Operational Trouble Shooting
SEM images to quailfy MF-26A developer
Picture and Location
This tool is located at EF3 on the SNF Cleanroom Map.
Process Capabilities
Cleanliness Standard
The svgdev appears in "All" equipment group (clean, semiclean, and gold) as part of the litho & analytical tools set.
Performance of the Tool
What the Tool CAN do
- Two automated, single-wafer track systems.
- 4 inch wafers only
- Dispenses developer MF-26A (2%TMAH, base)(read the SDS for MF-26A)
- Selectable programs at the developer and the bake stations.
Special Notes or Restrictions:
- Don't change the temperature of the bake station.
- Labmembers can’t make reservations. SNF staff reserves the tool for training or maintenance.
Contact List and How to Become a User
- "All Litho" class is required before training on any of the lithography tools.
- Shadow an experienced labmember (training checklist) and contact SNF staff in charge for training.
Operating Procedures
Before Developing
- Verify that the temperature of the hotplate is at 110°C, don't change the temperature!
- The developer (base) drains into the general lab acid waste neutralization (AWN) system. The system may be used only when the AWN is functioning. When there is a problem with the AWN, the yellow light (above wbclean_res-piranha or wbflexcorr-1) will flash. When the AWN warning system is flashing, no processing at the SVG developer tracks is allowed.
- Check that AUTO mode is selected.
1. Enable "svgdev" for back track or "svgdev2" for front track
On the front panel, select track one (back) or track two (front)
Check Rules for Operating svgdev for complete list of develop and bake programs.
Don't change the standard programs, develop programs 1 or 8 are not standard programs and may be changed.
2. Select a development program and oven bake program:
- Press "station select" to toggle between the developer or bake stations:
* (indicates the developer station is active)
+ (indicates the bake station is active)
- First type in the desired program number, then press "program select".
- Check the selected development and oven bake programs:
Verify that each event is correct (see program list)
- Press "event select" to step to the next event
DO NOT CHANGE the standard programs!
- To edit an incorrect event:
- Turn the key from "lock" to "program"
- Enter the number and press the operation button
i.e. for a speed of 500 - press "5" press "0" press "0" press "speed"
verify that it is correct
- Turn the key from "program" to "lock"
3. Load wafers in a black metal cassette and place the cassette on the load station.
- Make sure the backside of your wafer is clean, no resist or particles.
- Place the first wafer at the bottom of the cassette, front side facing up.
- It is recommended to run one dummy wafer before you load your process wafers.
4. Place an empty metal cassette on the receiving station.
- If the receiving station is down, double click the "Index Reset" button to raise it up.
- If a cassette is already present, tilt it for reset, otherwise the machine will not know it is there and will not move wafers from the cool plate to the cassette.
Caution: NEVER PUT WAFERS RESIST SIDE DOWN on a hotplate.
- Either develop them in manual mode using only the developer station ONLY
- OR select a program number on the bake station that has the first event "END". This will bypass these stations in AUTO mode.
5. Press "START"
- Don't leave the system while the wafers are running.
- The system transfers the bottom wafer from the load cassette into the first slot at the receiving station.
- Wait until all wafers are in the receiving cassette.
- To raise cassette, double click the Index Reset button.
- Remove cassette from unload station, load the dummy wafers back in the SVG dev dummy wafer box and your wafers in your box.
- Inspect the back side of each wafer for particles/dried developer. If particles are present, load wafers into a Teflon cassette with one brown button and clean wafers using the SRD (left to wbmiscres). The developed resist on the front side will not get damaged.
- Disable "svgdev" or "svgdev2"
Inspect the developed resist on the front side of your wafer using a microscope, make sure the yellow filter is installed, white light damages the resist.
Trouble Shooting
PROBLEM | ACTION |
alarm sounds | press clear button, you may need to press START too |
belts spinning, alarm sounding, no movement of wafer. | wafer is stuck, gently push the wafer with tweezers to advance it on belt. |