Published using Google Docs

Publication plan for the
virtual project on the history of ALD

October 18, 2013

Riikka Puurunen (Dr.), Senior Scientist, VTT Technical Research Centre of Finland

Aziz Abdulagatov (Dr.), Postdoctoral Fellow, National Institute of Standards and Technology (NIST), USA

Jonas Sundqvist (Dr.), Group Leader High-k Devices, Fraunhofer IPMS-CNT, Germany

Annina Titoff, editor-in-chief,



1) Poster at Baltic ALD 2014

We plan to publish the result of the “virtual project on the history of ALD” (info: as a poster at the Baltic ALD conference, Helsinki, May 12-13, 2014

2) Listing the early works at the site

After BALD 2014, the reference list created will be published at the website.

3) Poster at ALD 2014, Kyoto

The result of the “virtual project on the history of ALD” will be published as a poster also at ALD 2014, Kyoto

4) A review article on the early history of ALD in English

A review article will be written on the early developments of ALD in a scientific journal.

  1. Title is tentatively: “On the early history of atomic layer deposition: molecular layering and atomic layer epitaxy”
  2. The author list is tentatively: Riikka L. Puurunen, Aziz Abdulagatov, … , Jonas Sundqvist. In addition to Riikka, Aziz and Jonas, we seek two types of additional authors.
  1. We will contact people, who we potentially think could contribute significantly to the writing process, and request them to become authors. Some of the original authors of ML and ALE who have lived the early ALD days themselves naturally will be contacted, and we have other people in mind also.
  2. OPEN AUTHORSHIP. We will offer the possibility of becoming an author to anyone interested. We do this mainly for two reasons. (1) Our goal is to say everything that needs to be said of the early evolution of ALD in this review article, and we hope that the open authorship will ensure this. These types of authors are most likely scientists who have worked with ALD in the mid-1980’s or earlier. (2) Writing the review article is a lot of hard work, and we need people who are willing to do that hard work. These types of authors are most likely younger people, who have a passion in ALD, and are willing to give some of their expertise, effort and time for the common good for generating a great review paper.
    If you got interested and you fit in one of the two categories, please contact us and explain what is your motivation for joining and how you would like to contribute. Before applying, please look through instructions below carefully, to make sure that you are comfortable with the framework in which we
    plan to write the review.
  1. Contents: The contents of the review article will be partly based on the literature list and comments made in the “virtual project on the history of ALD”, and partly other sources. Other sources include further interpretations and experiences of the authors, books, interviews, etc. The contribution of the “virtual project on the history of ALD” will be clearly acknowledged.
  2. Schedule: We plan to start working on the review during fall 2013, at the same time as executing the “virtual project on the history of ALD”. We plan to submit the manuscript during the first half of 2014.
  3. Coverage: The review article will cover the same time frame as the “virtual project on the history of ALD”: from the earliest possible relevant literature up to and including 1986, when the first review article on atomic layer deposition written by others than the original inventors was published [Goodman & Pessa, J. Appl. Phys. 60, R65 (1986)]. We may also make comments on later developments and think of future perspectives.  


In the “sphere of openness, respect, and trust” in which the “virtual project on the history of ALD” is being carried out, a special feature of this review article is that we will open up the possibility of becoming an author for anyone, who is interested in it (“open authorship”).

In this review article, we are dealing with a part of history which has been poorly described so far, and where the “different sides” may have highly different views on initially. Our goal is to write a description of the history, which both the Western and the Eastern ALD communities agree with. This is a challenging task, and the writing work will also be more challenging than usually. There will be a multitude of authors from highly different backgrounds, and common language for the basis of discussions will not always exist to start with (both literally, meaning that the authors speak different languages, and figuratively, meaning that the authors come from different technological backgrounds and geographical area), and they may also have highly different habits of writing. All authors should consider the following and agree to work together with others respecting these approaches:

5) A review article on the early history of ALD in Russian

Our goal is to get the ALD history review paper, written originally in English, published as a Russian translation (thus, from English to Russian) in Russian scientific journal. We will most likely go for one of the journals where much of the molecular layering works have been published, but the details have not been decided yet.  

6) Oral presentation at Kyoto 2014?

We will request an oral presentation at ALD 2014, to describe the major turning points of the work, as has been found in the process of writing the review article. Of course, we cannot be sure that this will be accepted.

7) Updating wikipedia

If after accomplishing the “virtual project on the history of ALD” and writing the review paper it is evident that the information in wikipedia on the ALD pages can be improved, this will be done. (If you would like to volunteer for this, please contact us.)