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Publication plan for the
virtual project on the history of A
LD, v2.0

January 13, 2014

Riikka Puurunen (Dr.), Senior Scientist, VTT Technical Research Centre of Finland

Jonas Sundqvist (Dr.), Group Leader High-k Devices, Fraunhofer IPMS-CNT, Germany

Annina Titoff, editor-in-chief,



1) Poster at Baltic ALD 2014

The plan is to publish the result of the “virtual project on the history of ALD” (info: first as a poster at the Baltic ALD conference, Helsinki, May 12-13, 2014.

2) Listing the early works at the site

After BALD 2014, the reference list created will be published at the website.

3) Poster at ALD 2014, Kyoto

The result of the “virtual project on the history of ALD” will be published as a poster also at the AVS-ALD 2014 conference, Kyoto, June 15-18, 2014.  

4) Oral(?) presentation at ALD 2014, Kyoto

We will request another presentation at ALD 2014. Oral presentation is preferred, but we will also be happy, if a poster presentation is granted. 

5) A review article on the early history of ALD

The plan is to write a review on the early developments of ALD in a scientific journal. Optionally, we may seek to publish a translation of the review paper also in Russian.

The author list in the review article will be in the alphabetical order.

Prospective authors are requested to contact Riikka Puurunen (riikka.puurunen, and Jonas Sundqvist (jonas.sundqvist and explain how they could contribute to the review article. All authors of the review article should preferably participate also in the poster presentations.

6) Updating wikipedia

If after accomplishing the “virtual project on the history of ALD” and writing the review paper it is evident that the information in wikipedia on the ALD pages can be improved, this will be done. (If you would like to volunteer for this, please contact us.)