BAY 1 WEST WALL

Up/Down

BAY 2 WEST WALL

Up/Down

Comments

Current tools in the MTTC Cleanroom

Nikon Microscope and camera hooked to internet Mask inspection station underside lighting

Up

Supercritical point dryer

Up

Au Vacuum Evaporator

UP

Solvent Bench

Up

Spin Rinse Dryer (double stack)

Up

Nanometrics Thin Film Measurement Tool

Up

RCA Clean Bench

Down

Microscope (6 inch) with camera and internet connection

Up

AJA sputter System 3 DC guns one with magnetron, 2 RF guns, RF to chuck and Interactive gasses

Up

     

 

Single Wafer HMDS Oven

Up

Bell Jar Vacuum Evaporator

Up

Manual Coater

Up

BAY 2 EAST WALL

Hotplate

Up

6 Tube Diffusion System

Blue M Oven Convection Oven

Up

A1 - Silicon Nitride LPCVD

Down

Vacuum Oven

Up

A2 - Polysilicon LPCVD

Down

Interfermeter

Down

A3 - Low Temp Oxide LP

Down

Microscope (4 inch)

Up

B1 - Oxide Wet / Dry

Up

B2 - P (+) BBR3 Boron Dope and Drive Tube

Down

BAY 1 EAST WALL

B3 - N (+) POCL Phos. Dope and Drive Tube

Down

Acid Bench

Up

BAY 2 EAST WALL

Spin Rinse Dryer (double stack)

Up

Shadow Mask Aligner

Up

Caustic Bench with KOH bath

Up

Parylene Coater

Up

Karl Suss MA6 Contact Aligner with back side align capability

UP

DRIE etcher

Down

Four Point Probe

UP

BAY 3 WEST WALL

Up/Down

BAY 4 EAST WALL

Up/Down

Comments

RIE Plasma Etcher

Up

CEE Coater

Down

Contact Mark if usage is needed

Single Wafer HMDS Oven

Down

BAY 3 EAST WALL

Ellipsometer

Down

Room 154

Spin Disk Confocal Microscope

Up

 SEM/EDS

(Scanning Electron Microscope

with Energy Dispersive Spectroscopy)

Up

March Plasma etcher

Up

Dektak 8

Up

Contact Mark for questions 710-3527

BAY 4 WEST WALL

Nikon microscope and camera hooked to internet 6 inch wafers

Up

Contact Aligner with deep uv mirrors

Up

Developer Bench

Down