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Publication Plan for the
Virtual Project on the History of ALD,

April 5, 2015

On behalf of all the VPHA contributors

Riikka Puurunen (Dr.), Senior Scientist, VTT Technical Research Centre of Finland

Jonas Sundqvist (Dr.), Lab Operations Manager, Lund Nano Lab, Lund University, Sweden

Henrik Pedersen, Associate Professor, Linköping University, Sweden

Annina Titoff, Editor-in-Chief,

Current VPHA authors: Aarik, Jaan (Prof.), Akbashev, Andrew (M. Sc.), Bechelany, Mikhael (Dr.), Berdova, Maria (M. Sc.), Cameron, David (Prof.), Chekurov, Nikolai (Dr.), Drozd, Victor E. (Assoc. Prof.), Elliott, Simon D. (Dr.), Gottardi, Gloria (Dr.), Grigoras, Kestutis (Dr.), Junige, Marcel (M.Sc.), Kallio, Tanja (Dr.), Kanervo, Jaana (Dr.), Koshtyal, Yury (Dr.),

Kääriäinen, Marja-Leena (Dr.), Kääriäinen, Tommi O. (Dr.), Lamagna, Luca (Dr.), Malkov, Anatolii (Assoc. Prof.),

Malygin, Anatoly (Prof.), Molarius Jyrki (Dr.), Ozgit-Akgun, Cagla (Dr.), Pedersen, Henrik (Assoc. Prof.),

Puurunen, Riikka L. (Dr.), Pyymäki Perros, Alexander (M. Sc.), Ras, Robin H. A. (Prof.), Roozeboom, Fred (Prof.), Sajavaara, Timo (Dr.), Savin, Hele (Prof.), Seidel, Thomas E. (Dr.), Sundberg, Pia (Dr.), Sundqvist, Jonas (Dr.), Tallarida, Massimo (Dr.), van Ommen, J. Ruud (Dr.), Thomas Waechtler (Dr.), Wiemer, Claudia (Dr.), Ylivaara, Oili M. E. (M. Sc.)



1) Poster at Baltic ALD 2014

The plan is to publish the result of the “virtual project on the history of ALD” (info: first as a poster at the Baltic ALD conference, Helsinki, May 12-13, 2014.

STATUS: Completed 
Abstract of the published poster: 

2) Poster at ALD 2014, Kyoto

The result of the “virtual project on the history of ALD” will be published as a poster also at the AVS-ALD 2014 conference, Kyoto, June 15-18, 2014.  

STATUS: Completed 
Abstract of the poster: 
Poster (to be printed in several layers, that is, “3-D”):

3) Presentation at ALD 2014, Kyoto

We will request another presentation at ALD 2014. Oral presentation is preferred, but we will also be happy, if a poster presentation is granted. 

STATUS: Completed (a poster was granted)  
Poster abstract: 

4) ALD history tutorial at ALD 2014, Kyoto

An invited tutorial on the history of ALD was presented by Riikka Puurunen AVS-ALD 2014 conference, Kyoto, June 15-18, 2014. The invitation came on the basis of the two VPHA abstracts.  

STATUS: Completed


5) Essay on the early history of ALE-ALD

The invention and development of ALD under the name Atomic Layer Epitaxy under the leadership of Tuomo Suntola was described in: “A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy”, written by Riikka L. Puurunen and published in Chemical Vapor Deposition 20 (2014) 332-344, link: Originally, the story was written for the “40 Years of ALD in Finland: Photos, Stories” (FinALD40) exhibition organized by the Finnish Centre of Excellence in Atomic Layer Deposition ( for the Baltic ALD conference in Helsinki, May 12-13, 2014 (  

STATUS: Completed

This essay was written and published in 2014. The writing of the essay was not yet foreseen in the original VPHA Publication Plan (dated October 18, 2013) and also not in its first update (version 2.0, dated January 13, 2014). The essay has been afterwards included in the VPHA outcomes in Publication Plan v 3.0.

6) Website for ALD history and VPHA


STATUS: Completed

Updated with new info when needed (admin: R. Puurunen)

7) Exhibition: 40 years of ALD in Finland - Photos, Stories (FinALD40)

Celebrating the 40 years history of the Finnish ALD the Academy of Finland’s Finnish Centre of Excellence on Atomic Layer Deposition, organized an exhibition: “40 Years of ALD in Finland - Photos, Stories”. Initially, the exhibition was organized for the international Baltic ALD conference, May 12-13, 2014, Helsinki ( The main organizers of the exhibition were Dr. Riikka Puurunen (VTT) and Dr. Jaakko Niinistö (University of Helsinki). The famous patent on Atomic Layer Epitaxy (FIN 52359) was filed on November 29, 1974 and this history material was released exactly 40 years later, November 29, 2014.

STATUS: Completed


8) Review article/essay on the early history of ML-ALD

The invention and development of ALD under the name Molecular Layering under the leadership of Aleskovskii and Koltsov will be described in a review/essay. This review/essay will complement the already-published ALE-ALD essay. ALD professors in St. Petersburg lead the writing work. The VPHA participants help as appropriate, for example, by formulating questions to be answered in the review/essay.

STATUS: on-going

9) Presentation at ALD 2016

The plan is to publish the final literature list created in the VPHA as a poster at the AVS ALD 2016 conference.

STATUS: reading & commenting work on-going

10) Optional: general ALD history review article

After the review articles/essays on ALE-ALD and ML-ALD are ready, the VPHA group will judge whether there is still a need and place for a general ALD history review paper. If a further review will be written, the reading-work for VPHA and the poster presentation at AVS-ALD 2016 will form an important basis for it.

11) Updating wikipedia

If after accomplishing the “virtual project on the history of ALD” and writing the review paper it is evident that the information in wikipedia on the ALD pages can be improved, this will be done. (If you would like to volunteer for this, please contact us through the ALD History LinkedIn group.)  

12) Closing the VPHA